Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, Hirofumi Sakita, Hafizal Yahaya, H Naramoto, K Narumi, S Sakai, Y Maeda

Research output: Chapter in Book/Report/Conference proceedingForeword/postscript

Original languageEnglish
Title of host publicationJAEA-Review: JAEA Takasaki Annual Report 2008
PublisherJapan Atomic Energy Agency
Pages126
Number of pages1
Volume229-041
Publication statusPublished - Dec 2009

Cite this

Ikoma, Y., Motooka, T., Munetoh, S., Sakita, H., Yahaya, H., Naramoto, H., Narumi, K., Sakai, S., & Maeda, Y. (2009). Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). In JAEA-Review: JAEA Takasaki Annual Report 2008 (Vol. 229-041, pp. 126). Japan Atomic Energy Agency.