Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, Hirofumi Sakita, Hafizal Yahaya, H Naramoto, K Narumi, S Sakai, Y Maeda

Research output: Chapter in Book/Report/Conference proceedingForeword/postscript

Original languageEnglish
Title of host publicationJAEA-Review: JAEA Takasaki Annual Report 2008
PublisherJapan Atomic Energy Agency
Pages126
Number of pages1
Volume229-041
Publication statusPublished - Dec 2009

Cite this

Ikoma, Y., Motooka, T., Munetoh, S., Sakita, H., Yahaya, H., Naramoto, H., ... Maeda, Y. (2009). Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). In JAEA-Review: JAEA Takasaki Annual Report 2008 (Vol. 229-041, pp. 126). Japan Atomic Energy Agency.

Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). / Ikoma, Yoshifumi; Motooka, Teruaki; Munetoh, Shinji; Sakita, Hirofumi; Yahaya, Hafizal; Naramoto, H; Narumi, K; Sakai, S; Maeda, Y.

JAEA-Review: JAEA Takasaki Annual Report 2008. Vol. 229-041 Japan Atomic Energy Agency, 2009. p. 126.

Research output: Chapter in Book/Report/Conference proceedingForeword/postscript

Ikoma, Y, Motooka, T, Munetoh, S, Sakita, H, Yahaya, H, Naramoto, H, Narumi, K, Sakai, S & Maeda, Y 2009, Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). in JAEA-Review: JAEA Takasaki Annual Report 2008. vol. 229-041, Japan Atomic Energy Agency, pp. 126.
Ikoma Y, Motooka T, Munetoh S, Sakita H, Yahaya H, Naramoto H et al. Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). In JAEA-Review: JAEA Takasaki Annual Report 2008. Vol. 229-041. Japan Atomic Energy Agency. 2009. p. 126
Ikoma, Yoshifumi ; Motooka, Teruaki ; Munetoh, Shinji ; Sakita, Hirofumi ; Yahaya, Hafizal ; Naramoto, H ; Narumi, K ; Sakai, S ; Maeda, Y. / Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). JAEA-Review: JAEA Takasaki Annual Report 2008. Vol. 229-041 Japan Atomic Energy Agency, 2009. pp. 126
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T1 - Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

AU - Ikoma, Yoshifumi

AU - Motooka, Teruaki

AU - Munetoh, Shinji

AU - Sakita, Hirofumi

AU - Yahaya, Hafizal

AU - Naramoto, H

AU - Narumi, K

AU - Sakai, S

AU - Maeda, Y

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VL - 229-041

SP - 126

BT - JAEA-Review: JAEA Takasaki Annual Report 2008

PB - Japan Atomic Energy Agency

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