Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, Hirofumi Sakita, Hafizal Yahaya, H Naramoto, K Narumi, S Sakai, Y Maeda

Research output: Chapter in Book/Report/Conference proceedingForeword/postscript

Original languageEnglish
Title of host publicationJAEA-Review: JAEA Takasaki Annual Report 2008
PublisherJapan Atomic Energy Agency
Pages126
Number of pages1
Volume229-041
Publication statusPublished - Dec 2009

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