TY - JOUR
T1 - Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film
AU - Kobayashi, Takeshi
AU - Maeda, Ryutaro
AU - Itoh, Toshihiro
AU - Sawada, Renshi
N1 - Funding Information:
The authors thank Olympus Optical Co., Ltd., for the financial support and Miyajima of Olympus Optical Co., Ltd. for valuable advice for the present study. The authors thank to Noguchi and Suda for technical assistance to form the device.
PY - 2007
Y1 - 2007
N2 - The present study describes the design, fabrication, and demonstration of the optical microscanner with a piezoelectric resonator, sensor, and tuner: a smart optical microscanner. Pb (Zr,Ti) O3 thin film is deposited not only on the resonators but also on the hinges to act as the sensor or tuner. dc voltage applied to the tuner has shifted the resonant frequency and the sensor has successfully detected the shift of the resonant frequency. Though the frequency shift is only 1 HzV and the signal from the sensor is noisy, the results indicate the potential of the smart optical microscanner.
AB - The present study describes the design, fabrication, and demonstration of the optical microscanner with a piezoelectric resonator, sensor, and tuner: a smart optical microscanner. Pb (Zr,Ti) O3 thin film is deposited not only on the resonators but also on the hinges to act as the sensor or tuner. dc voltage applied to the tuner has shifted the resonant frequency and the sensor has successfully detected the shift of the resonant frequency. Though the frequency shift is only 1 HzV and the signal from the sensor is noisy, the results indicate the potential of the smart optical microscanner.
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U2 - 10.1063/1.2736296
DO - 10.1063/1.2736296
M3 - Article
AN - SCOPUS:34247886079
VL - 90
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 18
M1 - 183514
ER -