Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film

Takeshi Kobayashi, Ryutaro Maeda, Toshihiro Itoh, Renshi Sawada

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

The present study describes the design, fabrication, and demonstration of the optical microscanner with a piezoelectric resonator, sensor, and tuner: a smart optical microscanner. Pb (Zr,Ti) O3 thin film is deposited not only on the resonators but also on the hinges to act as the sensor or tuner. dc voltage applied to the tuner has shifted the resonant frequency and the sensor has successfully detected the shift of the resonant frequency. Though the frequency shift is only 1 HzV and the signal from the sensor is noisy, the results indicate the potential of the smart optical microscanner.

Original languageEnglish
Article number183514
JournalApplied Physics Letters
Volume90
Issue number18
DOIs
Publication statusPublished - May 10 2007

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resonators
sensors
thin films
resonant frequencies
hinges
frequency shift
fabrication
shift
electric potential

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film. / Kobayashi, Takeshi; Maeda, Ryutaro; Itoh, Toshihiro; Sawada, Renshi.

In: Applied Physics Letters, Vol. 90, No. 18, 183514, 10.05.2007.

Research output: Contribution to journalArticle

Kobayashi, Takeshi ; Maeda, Ryutaro ; Itoh, Toshihiro ; Sawada, Renshi. / Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film. In: Applied Physics Letters. 2007 ; Vol. 90, No. 18.
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