Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film

Takeshi Kobayashi; Ryutaro Maeda; Toshihiro Itoh; Renshi Sawada

doi:10.1063/1.2736296

Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film

Takeshi Kobayashi, Ryutaro Maeda, Toshihiro Itoh, Renshi Sawada

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Abstract

The present study describes the design, fabrication, and demonstration of the optical microscanner with a piezoelectric resonator, sensor, and tuner: a smart optical microscanner. Pb (Zr,Ti) O3 thin film is deposited not only on the resonators but also on the hinges to act as the sensor or tuner. dc voltage applied to the tuner has shifted the resonant frequency and the sensor has successfully detected the shift of the resonant frequency. Though the frequency shift is only 1 HzV and the signal from the sensor is noisy, the results indicate the potential of the smart optical microscanner.

Original language	English
Article number	183514
Journal	Applied Physics Letters
Volume	90
Issue number	18
DOIs	https://doi.org/10.1063/1.2736296
Publication status	Published - May 10 2007

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2736296

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AU - Itoh, Toshihiro

AU - Sawada, Renshi

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