Solid electrochemical micromachining using a tungsten microelectrode coated n with a polymer electrolyte

Kai Kamada, Masaaki Tokutomi, Miki Inada, Naoya Enomoto, Junichi Hojo

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Electrochemical micromachining of a metal plate was performed using a solid polymer electrolyte. The fundamental electrolysis system was composed of a metal plate (anode) | polymer electrolyte | tungsten needle (cathode), where the contact diameter of the metal | polymer interface was extremely small (a few μm). The metal substrate was electrochemically oxidized and then M n+ ions migrated to the polymer electrolyte. As a result of the continuous application of a dc voltage to the cell, finer-resolution micromachining (∼10μm) was achieved under room-temperature operation as compared with our previous results obtained using a Na-β″-Al 2O3 solid electrolyte. Furthermore, the present technique was applicable to many different kinds of metal substrates.

Original languageEnglish
Pages (from-to)672-677
Number of pages6
JournalJournal of the Ceramic Society of Japan
Volume115
Issue number1346
DOIs
Publication statusPublished - Jan 1 2007

Fingerprint

Tungsten
Microelectrodes
Micromachining
micromachining
Electrolytes
Polymers
tungsten
electrolytes
Plate metal
metal plates
Metals
polymers
metals
Solid electrolytes
solid electrolytes
Substrates
electrolysis
Electrolysis
needles
Needles

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

Solid electrochemical micromachining using a tungsten microelectrode coated n with a polymer electrolyte. / Kamada, Kai; Tokutomi, Masaaki; Inada, Miki; Enomoto, Naoya; Hojo, Junichi.

In: Journal of the Ceramic Society of Japan, Vol. 115, No. 1346, 01.01.2007, p. 672-677.

Research output: Contribution to journalArticle

Kamada, Kai ; Tokutomi, Masaaki ; Inada, Miki ; Enomoto, Naoya ; Hojo, Junichi. / Solid electrochemical micromachining using a tungsten microelectrode coated n with a polymer electrolyte. In: Journal of the Ceramic Society of Japan. 2007 ; Vol. 115, No. 1346. pp. 672-677.
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