Solid electrochemical micromachining using a tungsten microelectrode coated n with a polymer electrolyte

Kai Kamada, Masaaki Tokutomi, Miki Inada, Naoya Enomoto, Junichi Hojo

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4 Citations (Scopus)

Abstract

Electrochemical micromachining of a metal plate was performed using a solid polymer electrolyte. The fundamental electrolysis system was composed of a metal plate (anode) | polymer electrolyte | tungsten needle (cathode), where the contact diameter of the metal | polymer interface was extremely small (a few μm). The metal substrate was electrochemically oxidized and then M n+ ions migrated to the polymer electrolyte. As a result of the continuous application of a dc voltage to the cell, finer-resolution micromachining (∼10μm) was achieved under room-temperature operation as compared with our previous results obtained using a Na-β″-Al 2O3 solid electrolyte. Furthermore, the present technique was applicable to many different kinds of metal substrates.

Original languageEnglish
Pages (from-to)672-677
Number of pages6
JournalJournal of the Ceramic Society of Japan
Volume115
Issue number1346
DOIs
Publication statusPublished - Oct 2007

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All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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