Solid-state electrochemical micromachining

Kai Kamada, Kazuyoshi Izawa, Yuko Tsutsumi, Shuichi Yamashita, Naoya Enomoto, Junichi Hojo, Yasumichi Matsumoto

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

An approach for solid-state micromachining using an anodic electrochemical reaction at the microcontact between the ion conducting microelectrode and metal substrate was proposed. The method called solid-state electrochemical micromachining (SSEM), can control the machining size and depth by adjusting the contact area or other EM parameters. Scanning the microelectrode under an applied electric field results in a fine-patterned surface. The metal surface can be directly patterned in almost any configuration desired, since it is a solid-state process that do not require any solutions.

Original languageEnglish
Pages (from-to)1930-1932
Number of pages3
JournalChemistry of Materials
Volume17
Issue number8
DOIs
Publication statusPublished - Apr 19 2005

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

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