Solid-state electrochemical micromachining

Kai Kamada, Kazuyoshi Izawa, Yuko Tsutsumi, Shuichi Yamashita, Naoya Enomoto, Junichi Hojo, Yasumichi Matsumoto

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

An approach for solid-state micromachining using an anodic electrochemical reaction at the microcontact between the ion conducting microelectrode and metal substrate was proposed. The method called solid-state electrochemical micromachining (SSEM), can control the machining size and depth by adjusting the contact area or other EM parameters. Scanning the microelectrode under an applied electric field results in a fine-patterned surface. The metal surface can be directly patterned in almost any configuration desired, since it is a solid-state process that do not require any solutions.

Original languageEnglish
Pages (from-to)1930-1932
Number of pages3
JournalChemistry of Materials
Volume17
Issue number8
DOIs
Publication statusPublished - Apr 19 2005

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Micromachining
Microelectrodes
Metals
Machining
Electric fields
Ions
Scanning
Substrates

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

Cite this

Kamada, K., Izawa, K., Tsutsumi, Y., Yamashita, S., Enomoto, N., Hojo, J., & Matsumoto, Y. (2005). Solid-state electrochemical micromachining. Chemistry of Materials, 17(8), 1930-1932. https://doi.org/10.1021/cm0502929

Solid-state electrochemical micromachining. / Kamada, Kai; Izawa, Kazuyoshi; Tsutsumi, Yuko; Yamashita, Shuichi; Enomoto, Naoya; Hojo, Junichi; Matsumoto, Yasumichi.

In: Chemistry of Materials, Vol. 17, No. 8, 19.04.2005, p. 1930-1932.

Research output: Contribution to journalArticle

Kamada, K, Izawa, K, Tsutsumi, Y, Yamashita, S, Enomoto, N, Hojo, J & Matsumoto, Y 2005, 'Solid-state electrochemical micromachining', Chemistry of Materials, vol. 17, no. 8, pp. 1930-1932. https://doi.org/10.1021/cm0502929
Kamada K, Izawa K, Tsutsumi Y, Yamashita S, Enomoto N, Hojo J et al. Solid-state electrochemical micromachining. Chemistry of Materials. 2005 Apr 19;17(8):1930-1932. https://doi.org/10.1021/cm0502929
Kamada, Kai ; Izawa, Kazuyoshi ; Tsutsumi, Yuko ; Yamashita, Shuichi ; Enomoto, Naoya ; Hojo, Junichi ; Matsumoto, Yasumichi. / Solid-state electrochemical micromachining. In: Chemistry of Materials. 2005 ; Vol. 17, No. 8. pp. 1930-1932.
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