Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography

Yuta Sato, Kentaro Tomita, Syoichi Tsukiyama, Toshiaki Eguchi, Kiichiro Uchino, Kouichiro Kouge, Hiroaki Tomuro, Tatsuya Yanagida, Yasunori Wada, Masahito Kunishima, Takeshi Kodama, Hakaru Mizoguchi

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Engineering & Materials Science

Physics & Astronomy