Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma

Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Research output: Contribution to journalArticlepeer-review

Abstract

We have investigated spatial structure of fluctuation of amount of nanoparticles in amplitude modulated VHF discharge reactive plasma in order to understand interaction fluctuations between plasma and nanoparticles. The interaction fluctuation appeared in the whole discharge region. Especially, the strong interaction fluctuation existed at the edge region. The behaviors of time evolution of intensity of spatial structure of interaction fluctuation at the center and edge regions were different with each other. Nanoparticles at the edge region were smaller than ones in the main discharge region. It suggested that the interaction fluctuation is related to the growth of nanoparticles.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalPlasma and Fusion Research
Volume14
DOIs
Publication statusPublished - 2019

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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