Spectral dynamics of narrow-band F2 laser for optical lithography

H. Tanaka, A. Takahashi, T. Okada, T. Ariga, R. Nohdomi, K. Hotta, H. Mizoguchi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We describe the spectral dynamics of a line-narrowed F2 laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F2 laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F2 laser system. In addition, a new spectral narrowing technique for the F2 laser has been proposed and its effectiveness was evaluated by the simulation code.

Original languageEnglish
Pages (from-to)735-740
Number of pages6
JournalApplied Physics B: Lasers and Optics
Volume76
Issue number7
DOIs
Publication statusPublished - Jul 1 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Spectral dynamics of narrow-band F<sub>2</sub> laser for optical lithography'. Together they form a unique fingerprint.

  • Cite this