Spectroscopic ellipsometry characterization of the optical properties and thermal stability of Zr O2 films made by ion-beam assisted deposition

C. V. Ramana, S. Utsunomiya, R. C. Ewing, U. Becker, V. V. Atuchin, V. Sh Aliev, V. N. Kruchinin

Research output: Contribution to journal › Article › peer-review

65 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Spectroscopic ellipsometry characterization of the optical properties and thermal stability of Zr O2 films made by ion-beam assisted deposition'. Together they form a unique fingerprint.

Material Science