In order to clarify fundamental mechanism of pulsed laser deposition (PLD) process, Mach-Zehnder interferometry and laser scattering spectroscopy were applied to YBa2Cu3O7-x ablation plasma plume in atmospheric pressure. At the early stage ( < 10 μs), the KrF-laser ablation plume expands in agreement with the blast wave model, but later comes closer to the drag model. It is suggested that the yield of particulates in the ablation plume, which corresponds to the surface roughness of deposited film, increases with the laser energy density and the laser wavelength increase.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry