Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.
|Number of pages||3|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Issue number||7 SUPPL. B|
|Publication status||Published - Jul 1997|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)