Abstract
Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.
| Original language | English |
|---|---|
| Pages (from-to) | 4968-4970 |
| Number of pages | 3 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes |
| Volume | 36 |
| Issue number | 7 SUPPL. B |
| Publication status | Published - Jul 1997 |
| Externally published | Yes |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
- Engineering(all)
Cite this
Spectroscopic study of vapor-phase reactions in preparation of YBa2Cu3O7-x oxide thin film using pulsed laser deposition. / Yamagata, Yukihiko; Kurogi, Hiromitsu; Tsuchiya, Keisuke; Ikegami, Tomoaki; Ebihara, Kenji.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, Vol. 36, No. 7 SUPPL. B, 07.1997, p. 4968-4970.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Spectroscopic study of vapor-phase reactions in preparation of YBa2Cu3O7-x oxide thin film using pulsed laser deposition
AU - Yamagata, Yukihiko
AU - Kurogi, Hiromitsu
AU - Tsuchiya, Keisuke
AU - Ikegami, Tomoaki
AU - Ebihara, Kenji
PY - 1997/7
Y1 - 1997/7
N2 - Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.
AB - Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.
UR - http://www.scopus.com/inward/record.url?scp=0031175870&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0031175870&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0031175870
VL - 36
SP - 4968
EP - 4970
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 SUPPL. B
ER -