Spectroscopic study of vapor-phase reactions in preparation of YBa2Cu3O7-x oxide thin film using pulsed laser deposition

Yukihiko Yamagata, Hiromitsu Kurogi, Keisuke Tsuchiya, Tomoaki Ikegami, Kenji Ebihara

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2 Citations (Scopus)


Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.

Original languageEnglish
Pages (from-to)4968-4970
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number7 SUPPL. B
Publication statusPublished - Jul 1997
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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