Spectroscopic study of vapor-phase reactions in preparation of YBa2Cu3O7-x oxide thin film using pulsed laser deposition

Yukihiko Yamagata, Hiromitsu Kurogi, Keisuke Tsuchiya, Tomoaki Ikegami, Kenji Ebihara

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.

Original languageEnglish
Pages (from-to)4968-4970
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Volume36
Issue number7 SUPPL. B
Publication statusPublished - Jul 1997
Externally publishedYes

Fingerprint

Pulsed laser deposition
Oxide films
pulsed laser deposition
Vapors
vapor phases
Thin films
preparation
Molecules
oxides
Argon
thin films
argon
vapors
molecules
Optical emission spectroscopy
Superconducting films
Oxides
optical emission spectroscopy
Gas mixtures
plumes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

Cite this

Spectroscopic study of vapor-phase reactions in preparation of YBa2Cu3O7-x oxide thin film using pulsed laser deposition. / Yamagata, Yukihiko; Kurogi, Hiromitsu; Tsuchiya, Keisuke; Ikegami, Tomoaki; Ebihara, Kenji.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, Vol. 36, No. 7 SUPPL. B, 07.1997, p. 4968-4970.

Research output: Contribution to journalArticle

@article{4ebac061f8e3438a8ca35b3745256d8a,
title = "Spectroscopic study of vapor-phase reactions in preparation of YBa2Cu3O7-x oxide thin film using pulsed laser deposition",
abstract = "Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.",
author = "Yukihiko Yamagata and Hiromitsu Kurogi and Keisuke Tsuchiya and Tomoaki Ikegami and Kenji Ebihara",
year = "1997",
month = "7",
language = "English",
volume = "36",
pages = "4968--4970",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Institute of Physics",
number = "7 SUPPL. B",

}

TY - JOUR

T1 - Spectroscopic study of vapor-phase reactions in preparation of YBa2Cu3O7-x oxide thin film using pulsed laser deposition

AU - Yamagata, Yukihiko

AU - Kurogi, Hiromitsu

AU - Tsuchiya, Keisuke

AU - Ikegami, Tomoaki

AU - Ebihara, Kenji

PY - 1997/7

Y1 - 1997/7

N2 - Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.

AB - Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7-x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.

UR - http://www.scopus.com/inward/record.url?scp=0031175870&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031175870&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031175870

VL - 36

SP - 4968

EP - 4970

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7 SUPPL. B

ER -