Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties

Wan Young Chung, Go Sakai, Kengo Shimanoe, Norio Miura, Duk Dong Lee, Noboru Yamazoe

Research output: Contribution to journalConference article

18 Citations (Scopus)

Abstract

Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.

Original languageEnglish
Pages (from-to)312-315
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume65
Issue number1
DOIs
Publication statusPublished - Jun 30 2000
EventIMCS-7: 7th International Meeting on Chemical Sensors - Beijing, China
Duration: Jul 27 1998Jul 30 1998

Fingerprint

Aluminum Oxide
Silicon
indium oxides
Indium
Oxide films
Alumina
aluminum oxides
Gases
Spin coating
Thin films
Film thickness
coating
silicon
film thickness
Substrates
thin films
gases
Carboxymethylcellulose Sodium
operating temperature
Ammonium Compounds

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties. / Chung, Wan Young; Sakai, Go; Shimanoe, Kengo; Miura, Norio; Lee, Duk Dong; Yamazoe, Noboru.

In: Sensors and Actuators, B: Chemical, Vol. 65, No. 1, 30.06.2000, p. 312-315.

Research output: Contribution to journalConference article

Chung, Wan Young ; Sakai, Go ; Shimanoe, Kengo ; Miura, Norio ; Lee, Duk Dong ; Yamazoe, Noboru. / Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties. In: Sensors and Actuators, B: Chemical. 2000 ; Vol. 65, No. 1. pp. 312-315.
@article{9ca026ae705b47e78372ad84288a68c6,
title = "Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties",
abstract = "Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.",
author = "Chung, {Wan Young} and Go Sakai and Kengo Shimanoe and Norio Miura and Lee, {Duk Dong} and Noboru Yamazoe",
year = "2000",
month = "6",
day = "30",
doi = "10.1016/S0925-4005(99)00419-0",
language = "English",
volume = "65",
pages = "312--315",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",
number = "1",

}

TY - JOUR

T1 - Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties

AU - Chung, Wan Young

AU - Sakai, Go

AU - Shimanoe, Kengo

AU - Miura, Norio

AU - Lee, Duk Dong

AU - Yamazoe, Noboru

PY - 2000/6/30

Y1 - 2000/6/30

N2 - Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.

AB - Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.

UR - http://www.scopus.com/inward/record.url?scp=0034733270&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034733270&partnerID=8YFLogxK

U2 - 10.1016/S0925-4005(99)00419-0

DO - 10.1016/S0925-4005(99)00419-0

M3 - Conference article

AN - SCOPUS:0034733270

VL - 65

SP - 312

EP - 315

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

IS - 1

ER -