Spin-coated thin films of SiO2-WO3 composites for detection of sub-ppm NO2

Xusheng Wang; Go Sakai; Kengo Shimanoe; Norio Miura; Noboru Yamazoe

doi:10.1016/S0925-4005(97)00286-4

Spin-coated thin films of SiO₂-WO₃ composites for detection of sub-ppm NO₂

Xusheng Wang, Go Sakai, Kengo Shimanoe, Norio Miura, Noboru Yamazoe

Functional Materials Science

Research output: Contribution to journal › Article › peer-review

66 Citations (Scopus)

Abstract

Thin films of SiO₂-WO₃ composites with various SiO₂ contents (0-20 wt%) were prepared by means of sol-gel method. The grain size of WO₃ decreased with increasing SiO₂ content, resulting in an increase in NO₂ sensitivity. On the other hand, the response transient to NO₂ was brought to be the quickest at 5% SiO₂. The thin film of SiO₂(5%)-WO₃ was far more sensitive to NO₂ than the thin film or sintered block of pure WO₃. It could detect dilute NO₂ (0.1-2 ppm) in air at 350°C sensitively and fairly selectively. The NO₂ sensing characteristics were stable over the whole test period of 10 days.

Original language	English
Pages (from-to)	141-146
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	45
Issue number	2
DOIs	https://doi.org/10.1016/S0925-4005(97)00286-4
Publication status	Published - Dec 1 1997

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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title = "Spin-coated thin films of SiO2-WO3 composites for detection of sub-ppm NO2",

abstract = "Thin films of SiO2-WO3 composites with various SiO2 contents (0-20 wt%) were prepared by means of sol-gel method. The grain size of WO3 decreased with increasing SiO2 content, resulting in an increase in NO2 sensitivity. On the other hand, the response transient to NO2 was brought to be the quickest at 5% SiO2. The thin film of SiO2(5%)-WO3 was far more sensitive to NO2 than the thin film or sintered block of pure WO3. It could detect dilute NO2 (0.1-2 ppm) in air at 350°C sensitively and fairly selectively. The NO2 sensing characteristics were stable over the whole test period of 10 days.",

author = "Xusheng Wang and Go Sakai and Kengo Shimanoe and Norio Miura and Noboru Yamazoe",

note = "Funding Information: This work was partially supported by a Grant-in-Aid for Scientific Research from The Ministry of Education, Science, Sports and Culture of Japan, and a grant from Steel Industry Foundation for the Advancement of Environmental Protection Technology. ",

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AU - Wang, Xusheng

AU - Sakai, Go

AU - Shimanoe, Kengo

AU - Miura, Norio

AU - Yamazoe, Noboru

N1 - Funding Information: This work was partially supported by a Grant-in-Aid for Scientific Research from The Ministry of Education, Science, Sports and Culture of Japan, and a grant from Steel Industry Foundation for the Advancement of Environmental Protection Technology.

PY - 1997/12/1

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N2 - Thin films of SiO2-WO3 composites with various SiO2 contents (0-20 wt%) were prepared by means of sol-gel method. The grain size of WO3 decreased with increasing SiO2 content, resulting in an increase in NO2 sensitivity. On the other hand, the response transient to NO2 was brought to be the quickest at 5% SiO2. The thin film of SiO2(5%)-WO3 was far more sensitive to NO2 than the thin film or sintered block of pure WO3. It could detect dilute NO2 (0.1-2 ppm) in air at 350°C sensitively and fairly selectively. The NO2 sensing characteristics were stable over the whole test period of 10 days.

AB - Thin films of SiO2-WO3 composites with various SiO2 contents (0-20 wt%) were prepared by means of sol-gel method. The grain size of WO3 decreased with increasing SiO2 content, resulting in an increase in NO2 sensitivity. On the other hand, the response transient to NO2 was brought to be the quickest at 5% SiO2. The thin film of SiO2(5%)-WO3 was far more sensitive to NO2 than the thin film or sintered block of pure WO3. It could detect dilute NO2 (0.1-2 ppm) in air at 350°C sensitively and fairly selectively. The NO2 sensing characteristics were stable over the whole test period of 10 days.

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