Spin-coated thin films of SiO 2 -WO 3 composites for detection of sub-ppm NO 2

Xusheng Wang, Go Sakai, Kengo Shimanoe, Norio Miura, Noboru Yamazoe

Research output: Contribution to journal › Article

65 Citations (Scopus)

Abstract

Thin films of SiO 2 -WO 3 composites with various SiO 2 contents (0-20 wt%) were prepared by means of sol-gel method. The grain size of WO 3 decreased with increasing SiO 2 content, resulting in an increase in NO 2 sensitivity. On the other hand, the response transient to NO 2 was brought to be the quickest at 5% SiO 2 . The thin film of SiO 2 (5%)-WO 3 was far more sensitive to NO 2 than the thin film or sintered block of pure WO 3 . It could detect dilute NO 2 (0.1-2 ppm) in air at 350°C sensitively and fairly selectively. The NO 2 sensing characteristics were stable over the whole test period of 10 days.

Original languageEnglish
Pages (from-to)141-146
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume45
Issue number2
DOIs
Publication statusPublished - Dec 1 1997

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Thin films
composite materials
Composite materials
thin films
transient response
Transient analysis
Sol-gel process
grain size
gels
sensitivity
air
Air

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Spin-coated thin films of SiO 2 -WO 3 composites for detection of sub-ppm NO 2 . / Wang, Xusheng; Sakai, Go; Shimanoe, Kengo; Miura, Norio; Yamazoe, Noboru.

In: Sensors and Actuators, B: Chemical, Vol. 45, No. 2, 01.12.1997, p. 141-146.

Research output: Contribution to journal › Article

Wang, X, Sakai, G, Shimanoe, K, Miura, N & Yamazoe, N 1997, ' Spin-coated thin films of SiO 2 -WO 3 composites for detection of sub-ppm NO 2 ', Sensors and Actuators, B: Chemical, vol. 45, no. 2, pp. 141-146. https://doi.org/10.1016/S0925-4005(97)00286-4
Wang X, Sakai G, Shimanoe K, Miura N, Yamazoe N. Spin-coated thin films of SiO 2 -WO 3 composites for detection of sub-ppm NO 2 Sensors and Actuators, B: Chemical. 1997 Dec 1;45(2):141-146. https://doi.org/10.1016/S0925-4005(97)00286-4
Wang, Xusheng ; Sakai, Go ; Shimanoe, Kengo ; Miura, Norio ; Yamazoe, Noboru. / Spin-coated thin films of SiO 2 -WO 3 composites for detection of sub-ppm NO 2 In: Sensors and Actuators, B: Chemical. 1997 ; Vol. 45, No. 2. pp. 141-146.
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