We describe the use of cavity ring-down spectroscopy for measurement of number densities of sputtered particles. Applications for thruster characterization in electric propulsion and process monitoring in plasma engineering are discussed.
|Journal||Optics InfoBase Conference Papers|
|Publication status||Published - Jan 1 2008|
|Event||Laser Applications to Chemical, Security and Environmental Analysis, LACSEA 2008 - St. Petersburg, FL, United States|
Duration: Mar 17 2008 → Mar 20 2008
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics