Sputtering measurements by cavity ring-down spectroscopy and application to electric propulsion and plasma engineering

A. P. Yalin, L. Tao, N. Yamamoto

Research output: Contribution to journalConference article

Abstract

We describe the use of cavity ring-down spectroscopy for measurement of number densities of sputtered particles. Applications for thruster characterization in electric propulsion and process monitoring in plasma engineering are discussed.

Original languageEnglish
JournalOptics InfoBase Conference Papers
Publication statusPublished - Jan 1 2008
Externally publishedYes
EventLaser Applications to Chemical, Security and Environmental Analysis, LACSEA 2008 - St. Petersburg, FL, United States
Duration: Mar 17 2008Mar 20 2008

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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