Stable crystallization of a-Si film on a flexible substrate

T. Ashitomi; T. Harada; K. Nakao; C. J. Koswaththage; T. Okada; T. Noguchi; N. Kawamoto; Hiroshi Ikenoue; T. Okuyama; A. Suwa; K. Noda

Stable crystallization of a-Si film on a flexible substrate

T. Ashitomi, T. Harada, K. Nakao, C. J. Koswaththage, T. Okada, T. Noguchi, N. Kawamoto, Hiroshi Ikenoue, T. Okuyama, A. Suwa, K. Noda

Faculty of Information Science and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The ELA using high repetition pulse for a-Si film on flexible sheet is perfonned. As a result of multi-shots ELA, the crystal structure of Si film on oxide buffer layer was stably obtained in lower pulse energy density. High performance TFT on flexible sheet is expected.

Original language	English
Title of host publication	22nd International Display Workshops, IDW 2015
Publisher	International Display Workshops
Pages	1773-1774
Number of pages	2
ISBN (Electronic)	9781510845503
Publication status	Published - Jan 1 2015
Event	22nd International Display Workshops, IDW 2015 - Otsu, Japan Duration: Dec 9 2015 → Dec 11 2015

Publication series

Name	Proceedings of the International Display Workshops
Volume	3
ISSN (Print)	1883-2490

Other

Other	22nd International Display Workshops, IDW 2015
Country/Territory	Japan
City	Otsu
Period	12/9/15 → 12/11/15

All Science Journal Classification (ASJC) codes

Computer Vision and Pattern Recognition
Human-Computer Interaction
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Radiology Nuclear Medicine and imaging

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

Ashitomi, T., Harada, T., Nakao, K., Koswaththage, C. J., Okada, T., Noguchi, T., Kawamoto, N., Ikenoue, H., Okuyama, T., Suwa, A., & Noda, K. (2015). Stable crystallization of a-Si film on a flexible substrate. In 22nd International Display Workshops, IDW 2015 (pp. 1773-1774). (Proceedings of the International Display Workshops; Vol. 3). International Display Workshops.

Ashitomi, T, Harada, T, Nakao, K, Koswaththage, CJ, Okada, T, Noguchi, T, Kawamoto, N, Ikenoue, H, Okuyama, T, Suwa, A & Noda, K 2015, Stable crystallization of a-Si film on a flexible substrate. in 22nd International Display Workshops, IDW 2015. Proceedings of the International Display Workshops, vol. 3, International Display Workshops, pp. 1773-1774, 22nd International Display Workshops, IDW 2015, Otsu, Japan, 12/9/15.

@inproceedings{ab2dcfda56d14543b8f921fb1fa03476,

title = "Stable crystallization of a-Si film on a flexible substrate",

abstract = "The ELA using high repetition pulse for a-Si film on flexible sheet is perfonned. As a result of multi-shots ELA, the crystal structure of Si film on oxide buffer layer was stably obtained in lower pulse energy density. High performance TFT on flexible sheet is expected.",

author = "T. Ashitomi and T. Harada and K. Nakao and Koswaththage, {C. J.} and T. Okada and T. Noguchi and N. Kawamoto and Hiroshi Ikenoue and T. Okuyama and A. Suwa and K. Noda",

year = "2015",

month = jan,

day = "1",

language = "English",

series = "Proceedings of the International Display Workshops",

publisher = "International Display Workshops",

pages = "1773--1774",

booktitle = "22nd International Display Workshops, IDW 2015",

note = "22nd International Display Workshops, IDW 2015 ; Conference date: 09-12-2015 Through 11-12-2015",

}

TY - GEN

T1 - Stable crystallization of a-Si film on a flexible substrate

AU - Ashitomi, T.

AU - Harada, T.

AU - Nakao, K.

AU - Koswaththage, C. J.

AU - Okada, T.

AU - Noguchi, T.

AU - Kawamoto, N.

AU - Ikenoue, Hiroshi

AU - Okuyama, T.

AU - Suwa, A.

AU - Noda, K.

PY - 2015/1/1

Y1 - 2015/1/1

N2 - The ELA using high repetition pulse for a-Si film on flexible sheet is perfonned. As a result of multi-shots ELA, the crystal structure of Si film on oxide buffer layer was stably obtained in lower pulse energy density. High performance TFT on flexible sheet is expected.

AB - The ELA using high repetition pulse for a-Si film on flexible sheet is perfonned. As a result of multi-shots ELA, the crystal structure of Si film on oxide buffer layer was stably obtained in lower pulse energy density. High performance TFT on flexible sheet is expected.

UR - http://www.scopus.com/inward/record.url?scp=85056483626&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85056483626&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85056483626

T3 - Proceedings of the International Display Workshops

SP - 1773

EP - 1774

BT - 22nd International Display Workshops, IDW 2015

PB - International Display Workshops

T2 - 22nd International Display Workshops, IDW 2015

Y2 - 9 December 2015 through 11 December 2015

ER -

Stable crystallization of a-Si film on a flexible substrate

Abstract

Publication series

Other

All Science Journal Classification (ASJC) codes

UN SDGs

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