Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance

Noriaki Ishikawa, Koji Okazaki, Ayumu Kudo, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes.

Original languageEnglish
Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PublisherIEEE Computer Society
Volume2016-September
ISBN (Electronic)9781509010356
DOIs
Publication statusPublished - Sep 13 2016
Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
Duration: Jul 31 2016Aug 4 2016

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
CountrySingapore
CitySingapore
Period7/31/168/4/16

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Ishikawa, N., Okazaki, K., Kudo, A., & Sawada, R. (2016). Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings (Vol. 2016-September). [7565866] IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565866