Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance

Noriaki Ishikawa, Koji Okazaki, Ayumu Kudo, Renshi Sawada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes.

    Original languageEnglish
    Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
    PublisherIEEE Computer Society
    ISBN (Electronic)9781509010356
    DOIs
    Publication statusPublished - Sep 13 2016
    Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
    Duration: Jul 31 2016Aug 4 2016

    Publication series

    NameInternational Conference on Optical MEMS and Nanophotonics
    Volume2016-September
    ISSN (Print)2160-5033
    ISSN (Electronic)2160-5041

    Other

    Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
    CountrySingapore
    CitySingapore
    Period7/31/168/4/16

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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