TY - JOUR
T1 - Stable surface termination on vicinal 6H-SiC(0 0 0 1) surfaces
AU - Hayashi, Kenjiro
AU - Morita, Kouhei
AU - Mizuno, Seigi
AU - Tochihara, Hiroshi
AU - Tanaka, Satoru
N1 - Funding Information:
This study was supported by the Industrial Technology Research Grant Program in ‘05 from NEDO of Japan, and KAKENHI (20340077).
PY - 2009/2/1
Y1 - 2009/2/1
N2 - Ordered nanofacet structures on vicinal 6H-SiC(0 0 0 1) surfaces, consisting of pairs of a (0 0 0 1) basal plane and a (1 1 over(2, ̄) n) facet, are investigated in terms of stable surface stacking of the (0 0 0 1) basal planes. The surface termination of S3 (or S3*), i.e., ABC (or A*C*B*), was suggested by a structural model based on quantized step-bunching, which typically gives a one-unit-cell bunched step configuration at the (1 1 over(2, ̄) n) facet. Here, we evaluate the surface termination at basal planes covered with a layer of silicon oxynitride by means of quantitative low-energy electron diffraction (LEED) analysis combined with scanning tunneling microscopy (STM), and show the validity of the structural model proposed.
AB - Ordered nanofacet structures on vicinal 6H-SiC(0 0 0 1) surfaces, consisting of pairs of a (0 0 0 1) basal plane and a (1 1 over(2, ̄) n) facet, are investigated in terms of stable surface stacking of the (0 0 0 1) basal planes. The surface termination of S3 (or S3*), i.e., ABC (or A*C*B*), was suggested by a structural model based on quantized step-bunching, which typically gives a one-unit-cell bunched step configuration at the (1 1 over(2, ̄) n) facet. Here, we evaluate the surface termination at basal planes covered with a layer of silicon oxynitride by means of quantitative low-energy electron diffraction (LEED) analysis combined with scanning tunneling microscopy (STM), and show the validity of the structural model proposed.
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U2 - 10.1016/j.susc.2008.12.025
DO - 10.1016/j.susc.2008.12.025
M3 - Article
AN - SCOPUS:58749105615
VL - 603
SP - 566
EP - 570
JO - Surface Science
JF - Surface Science
SN - 0039-6028
IS - 3
ER -