Sterilization of medical equipment using radicals produced by oxygen/water vapor RF plasma

Nobuya Hayashi, Weimin Guan, Shinsuke Tsutsui, Tetsushi Tomari, Yasushi Hanada

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77 Citations (Scopus)


The sterilization of medical equipment was performed using low-pressure RF discharge plasma. Oxygen radicals as oxidizing materials for sterilization were produced from oxygen or water vapor. The generation of atomic oxygen and OH radicals was confirmed using the light emission spectra of the plasma. The pressure in the discharge region was varied periodically during inactivation in order to produce radicals effectively and to penetrate the produced radicals into tiny gaps. Medium sheets for microbial detection indicated that the decimal reduction value of active bacillus was 5 and 8 min using oxygen plasma and water vapor plasma with ne = 109 cm-3, respectively. Biological indicators clarified that the sterilization of bacilli spores was successful tor a treatment time ot 90 min.

Original languageEnglish
Pages (from-to)8358-8363
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number10 B
Publication statusPublished - Oct 21 2006
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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