Stitching interferometric metrology for steeply curved x-ray mirrors

Hirokatsu Yumoto, Hidekazu Mimura, Takashi Kimura, Soichiro Handa, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

We have developed a new type of relative angle determinable stitching interferometry (RADSI) for hard x-ray nanofocusing mirrors. The system consists of a microscope Michelson interferometer, and a large-area Fizeau interferometer. The surface figure profile of each local area is measured by the Michelson interferometer and, at the same time, the stitching angles between neighboring shots are determined by using the large-area Fizeau interferometer. Tests using a flat mirror were carried out for calibration. The repeatability was found to be 0.8 nm root mean square (RMS). To demonstrate the accuracy of the developed system, we measured an elliptically figured mirror used for hard x-ray focusing. The obtained results were compared with a profile measured by another method. Both profiles were in good agreement at the subnanometer level.

Original languageEnglish
Pages (from-to)1023-1027
Number of pages5
JournalSurface and Interface Analysis
Volume40
Issue number6-7
DOIs
Publication statusPublished - Jun 1 2008
Externally publishedYes

Fingerprint

Michelson interferometers
Interferometers
metrology
Mirrors
mirrors
X rays
interferometers
profiles
Interferometry
Microscopes
x rays
Calibration
shot
interferometry
microscopes

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Yumoto, H., Mimura, H., Kimura, T., Handa, S., Matsuyama, S., Sano, Y., & Yamauchi, K. (2008). Stitching interferometric metrology for steeply curved x-ray mirrors. Surface and Interface Analysis, 40(6-7), 1023-1027. https://doi.org/10.1002/sia.2807

Stitching interferometric metrology for steeply curved x-ray mirrors. / Yumoto, Hirokatsu; Mimura, Hidekazu; Kimura, Takashi; Handa, Soichiro; Matsuyama, Satoshi; Sano, Yasuhisa; Yamauchi, Kazuto.

In: Surface and Interface Analysis, Vol. 40, No. 6-7, 01.06.2008, p. 1023-1027.

Research output: Contribution to journalArticle

Yumoto, H, Mimura, H, Kimura, T, Handa, S, Matsuyama, S, Sano, Y & Yamauchi, K 2008, 'Stitching interferometric metrology for steeply curved x-ray mirrors', Surface and Interface Analysis, vol. 40, no. 6-7, pp. 1023-1027. https://doi.org/10.1002/sia.2807
Yumoto, Hirokatsu ; Mimura, Hidekazu ; Kimura, Takashi ; Handa, Soichiro ; Matsuyama, Satoshi ; Sano, Yasuhisa ; Yamauchi, Kazuto. / Stitching interferometric metrology for steeply curved x-ray mirrors. In: Surface and Interface Analysis. 2008 ; Vol. 40, No. 6-7. pp. 1023-1027.
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