Strained-Si/SiGe-on-insulator wafers fabricated by Ge-condensation process

N. Hirashita, T. Numata, T. Tezuka, N. Sugiyama, K. Usuda, T. Irisawa, A. Tanabe, Y. Moriyama, S. Nakaharai, S. Takagi, E. Toyoda, Y. Miyamura

Research output: Contribution to journalConference articlepeer-review

10 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds