Strength evaluation of polycrystalline silicon structure considering sidewall morphology

S. Hamada, Y. Sugimoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In order to evaluate strength of micron size polycrystalline silicon (poly-Si) structure for MEMS considering surface morphology difference between top and sidewall and effective surface area, bending strength tests of cantilever beam, surface roughness measurement and fracture surface analysis are performed. The specimens are made by CVD process for poly-Si deposition and deep RIE process for sidewall formation, and then the surface morphology of the top and the sidewall surface are different. The various size notches on the specimen are introduced in order to change effective surface area. By the fracture surface analysis, it was found that the fracture initiation point was not always maximum stress point; this is because there exist stress concentration on the surface. Surface roughness was measured using atomic force microscope (AFM). Then the maximum stress concentration of the specimen on the top and the sidewall surface respectively were presumed using extreme statistics, and effective surface area was defined. Then, bending strength and effective surface area shows good correlation.

Original languageEnglish
Title of host publication12th International Conference on Fracture 2009, ICF-12
Pages4249-4258
Number of pages10
Publication statusPublished - Dec 1 2009
Event12th International Conference on Fracture 2009, ICF-12 - Ottawa, ON, Canada
Duration: Jul 12 2009Jul 17 2009

Publication series

Name12th International Conference on Fracture 2009, ICF-12
Volume6

Other

Other12th International Conference on Fracture 2009, ICF-12
CountryCanada
CityOttawa, ON
Period7/12/097/17/09

Fingerprint

Polysilicon
silicon
surface area
Surface analysis
surface roughness
Bending strength
Surface morphology
Stress concentration
Surface roughness
fracture initiation
Roughness measurement
Surface measurement
Reactive ion etching
Cantilever beams
evaluation
MEMS
Chemical vapor deposition
Microscopes
Statistics

All Science Journal Classification (ASJC) codes

  • Geotechnical Engineering and Engineering Geology

Cite this

Hamada, S., & Sugimoto, Y. (2009). Strength evaluation of polycrystalline silicon structure considering sidewall morphology. In 12th International Conference on Fracture 2009, ICF-12 (pp. 4249-4258). (12th International Conference on Fracture 2009, ICF-12; Vol. 6).

Strength evaluation of polycrystalline silicon structure considering sidewall morphology. / Hamada, S.; Sugimoto, Y.

12th International Conference on Fracture 2009, ICF-12. 2009. p. 4249-4258 (12th International Conference on Fracture 2009, ICF-12; Vol. 6).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hamada, S & Sugimoto, Y 2009, Strength evaluation of polycrystalline silicon structure considering sidewall morphology. in 12th International Conference on Fracture 2009, ICF-12. 12th International Conference on Fracture 2009, ICF-12, vol. 6, pp. 4249-4258, 12th International Conference on Fracture 2009, ICF-12, Ottawa, ON, Canada, 7/12/09.
Hamada S, Sugimoto Y. Strength evaluation of polycrystalline silicon structure considering sidewall morphology. In 12th International Conference on Fracture 2009, ICF-12. 2009. p. 4249-4258. (12th International Conference on Fracture 2009, ICF-12).
Hamada, S. ; Sugimoto, Y. / Strength evaluation of polycrystalline silicon structure considering sidewall morphology. 12th International Conference on Fracture 2009, ICF-12. 2009. pp. 4249-4258 (12th International Conference on Fracture 2009, ICF-12).
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