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Stress analysis of dielectrics using FEM for Analyzing the cause of cracking observed after W-CMP
Akira Fukuda, Yoshihiro Mochizuki, Hirokuni Hiyama, Manabu Tsujimura, Toshiro Doi, Syuhei Kurokawa
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)