Stress-Relaxation Process during Post-Annealing in SGOI Formed by H^+ Irradiation and Oxidation-Induced Ge Condensation

Masanori Tanaka, Taizoh Sadoh, Koji Matsumoto, Toyotsugu Enokida, Masanobu Miyao

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)444-445
Number of pages2
JournalExtended abstracts of the ... Conference on Solid State Devices and Materials
Volume2006
Publication statusPublished - Sep 13 2006

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