Structural and dielectric properties of Ba(Ti1-xSnx)O3 thin films

Mitsuo Tsukada, Masashi Mukaida, Shintaro Miyazawa

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Close correlation between the dielectric constant and the degree of preferential (111) orientation is found for Ba(Ti0.85Sn0.15)O3 (BTS15) solid-solution thin films deposited on a Pt/Ti/SiO2/Si(100) substrate by pulsed laser deposition. It is shown that substrate temperature is the principal factor which determines orientation and crystalline quality of the films. Substrate temperatures higher than 700°C are required to achieve (111) orientation with good crystalline quality. BTS15 films with strong (111) orientation have large dielectric constant which reaches 2500 at 22°C. These films exhibit a D-E hysteresis loop, but small remanent polarization of 0.89 μC/cm2 and coercive field of 3.2kV/cm are obtained at 18°C. Films having the composition with lower Sn ratio exhibit larger remanent polarization. Causal relationships among the dominant film orientation, crystalline quality and dielectric constant are discussed.

Original languageEnglish
Pages (from-to)4908-4912
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume35
Issue number9 SUPPL. B
Publication statusPublished - Sep 1 1996
Externally publishedYes

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Dielectric properties
dielectric properties
Structural properties
Thin films
Crystal orientation
thin films
Permittivity
Remanence
Crystalline materials
permittivity
Substrates
Pulsed laser deposition
Hysteresis loops
polarization
Solid solutions
pulsed laser deposition
solid solutions
Temperature
hysteresis
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Structural and dielectric properties of Ba(Ti1-xSnx)O3 thin films. / Tsukada, Mitsuo; Mukaida, Masashi; Miyazawa, Shintaro.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 35, No. 9 SUPPL. B, 01.09.1996, p. 4908-4912.

Research output: Contribution to journalArticle

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