Structural and physical characteristics of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited using a coaxial arc plasma gun

Tsuyoshi Yoshitake, You Nakagawa, Akira Nagano, Ryota Ohtani, Hiroyuki Setoyama, Eiichi Kobayashi, Kazushi Sumitani, Yoshiaki Agawa, Kunihito Nagayama

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    40 Citations (Scopus)

    Abstract

    Ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films were formed without initial nucleation using a coaxial arc plasma gun. The UNCD crystallite diameters estimated from the X-ray diffraction peaks were approximately 2nm. The Fourier transform infrared absorption spectrum exhibited an intense sp3-CH peak that might originate from the grain boundaries between UNCD crystallites whose dangling bonds are terminated with hydrogen atoms. A narrow sp3 peak in the photoemission spectrum implied that the film comprises a large number of UNCD crystallites. Large optical absorption coefficients at photon energies larger than 3eV that might be due to the grain boundaries are specific to the UNCD/a-C:H films.

    Original languageEnglish
    Article number015503
    JournalJapanese journal of applied physics
    Volume49
    Issue number1 Part 1
    DOIs
    Publication statusPublished - 2010

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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