Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication (II)

Teruaki Motooka, Yoshifumi Ikoma, Shinji Munetoh, Lei Yang, H Naramoto, K Narumi, S Sakai, Y. Maeda

Research output: Chapter in Book/Report/Conference proceedingForeword/postscript

Original languageEnglish
Title of host publicationJAEA-Review: JAEA Takasaki annual report 2007
Pages140
Number of pages1
Volume2008-055
Publication statusPublished - Nov 2008

Cite this

Motooka, T., Ikoma, Y., Munetoh, S., Yang, L., Naramoto, H., Narumi, K., ... Maeda, Y. (2008). Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication (II). In JAEA-Review: JAEA Takasaki annual report 2007 (Vol. 2008-055, pp. 140)