Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication (II)

Teruaki Motooka, Yoshifumi Ikoma, Shinji Munetoh, Lei Yang, H Naramoto, K Narumi, S Sakai, Y. Maeda

Research output: Working paper

Cite this

@techreport{c7e43ae3803d4bc6a1e2b27fa9ccca49,

title = "Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication (II)",

author = "Teruaki Motooka and Yoshifumi Ikoma and Shinji Munetoh and Lei Yang and H Naramoto and K Narumi and S Sakai and Y. Maeda",

year = "2008",

month = nov,

language = "English",

volume = "2008-055",

pages = "140",

type = "WorkingPaper",

}

TY - UNPB

T1 - Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication (II)

AU - Motooka, Teruaki

AU - Ikoma, Yoshifumi

AU - Munetoh, Shinji

AU - Yang, Lei

AU - Naramoto, H

AU - Narumi, K

AU - Sakai, S

AU - Maeda, Y.

PY - 2008/11

Y1 - 2008/11

M3 - Working paper

VL - 2008-055

SP - 140

BT - Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication (II)

ER -