Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, X. Q. Cheng, H Naramoto, K Narumi, S Sakai, Y. Maeda

    Research output: Working paper

    Original languageEnglish
    Pages169
    Volume2007-060
    Publication statusPublished - Mar 2008

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