Structure of temperature and velocity fields in the Si melt of a Czochralksi crystal growth system

Kyung Woo Yi, Vicki B. Booker, Minoru Eguchi, Toshiyuki Shyo, Koichi Kakimoto

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

Non-axisymmetric temperature and velocity profiles attributed to crucible rotation in the Si melt of a Czochralski (Cz) system were studied numerically by using three-dimensional (3D) numerical simulation and experimentally by measuring temperature. Two types of non-axisymmetric temperature and velocity profiles were found to exist in the melt. The type observed at low rotation rates occurs under conditions in which Rayleigh-Bénard instability occurs, and the other type of non-axisymmetric flow observed at high rotation rates occurs under conditions corresponding to the occurrence of the baroclinic instability in the rotating annulus. The 3D structure of the temperature field was studied experimentally to confirm the possibility of baroclinic instability in the melt. The predominant trend was a tilt of the temperature field in the same direction as crucible rotation. It was found that the temperature field tilted along the azimuthal direction under conditions in which baroclinic instability occurs.

Original languageEnglish
Pages (from-to)383-392
Number of pages10
JournalJournal of Crystal Growth
Volume156
Issue number4
DOIs
Publication statusPublished - Dec 1 1995
Externally publishedYes

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Crystallization
Crystal growth
crystal growth
baroclinic instability
temperature distribution
velocity distribution
Temperature distribution
Crucibles
crucibles
temperature profiles
Temperature
annuli
occurrences
Computer simulation
trends
simulation
Direction compound
temperature

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this

Structure of temperature and velocity fields in the Si melt of a Czochralksi crystal growth system. / Yi, Kyung Woo; Booker, Vicki B.; Eguchi, Minoru; Shyo, Toshiyuki; Kakimoto, Koichi.

In: Journal of Crystal Growth, Vol. 156, No. 4, 01.12.1995, p. 383-392.

Research output: Contribution to journalArticle

Yi, Kyung Woo ; Booker, Vicki B. ; Eguchi, Minoru ; Shyo, Toshiyuki ; Kakimoto, Koichi. / Structure of temperature and velocity fields in the Si melt of a Czochralksi crystal growth system. In: Journal of Crystal Growth. 1995 ; Vol. 156, No. 4. pp. 383-392.
@article{1cd171b8d3894fa5a2f4017fd1503248,
title = "Structure of temperature and velocity fields in the Si melt of a Czochralksi crystal growth system",
abstract = "Non-axisymmetric temperature and velocity profiles attributed to crucible rotation in the Si melt of a Czochralski (Cz) system were studied numerically by using three-dimensional (3D) numerical simulation and experimentally by measuring temperature. Two types of non-axisymmetric temperature and velocity profiles were found to exist in the melt. The type observed at low rotation rates occurs under conditions in which Rayleigh-B{\'e}nard instability occurs, and the other type of non-axisymmetric flow observed at high rotation rates occurs under conditions corresponding to the occurrence of the baroclinic instability in the rotating annulus. The 3D structure of the temperature field was studied experimentally to confirm the possibility of baroclinic instability in the melt. The predominant trend was a tilt of the temperature field in the same direction as crucible rotation. It was found that the temperature field tilted along the azimuthal direction under conditions in which baroclinic instability occurs.",
author = "Yi, {Kyung Woo} and Booker, {Vicki B.} and Minoru Eguchi and Toshiyuki Shyo and Koichi Kakimoto",
year = "1995",
month = "12",
day = "1",
doi = "10.1016/0022-0248(95)00277-4",
language = "English",
volume = "156",
pages = "383--392",
journal = "Journal of Crystal Growth",
issn = "0022-0248",
publisher = "Elsevier",
number = "4",

}

TY - JOUR

T1 - Structure of temperature and velocity fields in the Si melt of a Czochralksi crystal growth system

AU - Yi, Kyung Woo

AU - Booker, Vicki B.

AU - Eguchi, Minoru

AU - Shyo, Toshiyuki

AU - Kakimoto, Koichi

PY - 1995/12/1

Y1 - 1995/12/1

N2 - Non-axisymmetric temperature and velocity profiles attributed to crucible rotation in the Si melt of a Czochralski (Cz) system were studied numerically by using three-dimensional (3D) numerical simulation and experimentally by measuring temperature. Two types of non-axisymmetric temperature and velocity profiles were found to exist in the melt. The type observed at low rotation rates occurs under conditions in which Rayleigh-Bénard instability occurs, and the other type of non-axisymmetric flow observed at high rotation rates occurs under conditions corresponding to the occurrence of the baroclinic instability in the rotating annulus. The 3D structure of the temperature field was studied experimentally to confirm the possibility of baroclinic instability in the melt. The predominant trend was a tilt of the temperature field in the same direction as crucible rotation. It was found that the temperature field tilted along the azimuthal direction under conditions in which baroclinic instability occurs.

AB - Non-axisymmetric temperature and velocity profiles attributed to crucible rotation in the Si melt of a Czochralski (Cz) system were studied numerically by using three-dimensional (3D) numerical simulation and experimentally by measuring temperature. Two types of non-axisymmetric temperature and velocity profiles were found to exist in the melt. The type observed at low rotation rates occurs under conditions in which Rayleigh-Bénard instability occurs, and the other type of non-axisymmetric flow observed at high rotation rates occurs under conditions corresponding to the occurrence of the baroclinic instability in the rotating annulus. The 3D structure of the temperature field was studied experimentally to confirm the possibility of baroclinic instability in the melt. The predominant trend was a tilt of the temperature field in the same direction as crucible rotation. It was found that the temperature field tilted along the azimuthal direction under conditions in which baroclinic instability occurs.

UR - http://www.scopus.com/inward/record.url?scp=0029528745&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029528745&partnerID=8YFLogxK

U2 - 10.1016/0022-0248(95)00277-4

DO - 10.1016/0022-0248(95)00277-4

M3 - Article

VL - 156

SP - 383

EP - 392

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

SN - 0022-0248

IS - 4

ER -