Studies on the optimum condition for the formation of a neutral loop discharge plasma

Y. M. Sung, K. Uchino, K. Muraoka, T. Sakoda

Research output: Contribution to journalConference article

28 Citations (Scopus)

Abstract

Electron behavior was studied to obtain the guidelines for the design and operation of a new plasma source by a magnetic neutral loop discharge (NLD) plasma devices. Model incorporating the effects of a three-dimensional electromagnetic field with spatial decay of the radio frequency electric field, and the limitation of the spatial extent of the electron motion was used to analyze the electron behavior. Optimum plasma production value existed for the optimum magnetic field gradient.

Original languageEnglish
Pages (from-to)2149-2152
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume18
Issue number5
DOIs
Publication statusPublished - Sep 2000
Event47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing - Boston, USA
Duration: Oct 2 2000Oct 6 2000

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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