Study of femtosecond laser ablation effect on micro-processing for 4H-SiC substrate

Chengwu Wang, Syuhei Kurokawa, Julong Yuan, Li Fan, Huizong Lu, Zhe Wu, Weifeng Yao, Kehua Zhang, Yu Zhang, Toshiro Doi

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science