Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation

Kuan Chen Chen, Kuo Feng Chiu, Kohei Ogiwara, Li Wen Su, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The spatial profiles of a VHF H2 plasma (60MHz) for different discharge gap distances were examined at pressures of 66.7 and 133.3 Pa by twodimensional simulations using the plasma hybrid code. The electron density had a peak profile, and the maximum density depended on both the discharge gap distance and the pressure. A high-electron-density plasma with a low-electron temperature of approximately 1 eV was predicted by simulation at discharge gap distances of 15 and 20 mm. The plasma potential profile was composed of a plateau at the center and sharp slopes at the two sides. The axial profiles of the H+, H2+, and H3+ densities were calculated for the discharge gap distances of 10, 15, and 20 mm. It was found that the dominant ion species was H3+ except near the discharge electrode and the H2+ density near the discharge electrode was not negligible compared with the H3+ density at 66.7 Pa.

Original languageEnglish
Article number01AC05
JournalJapanese Journal of Applied Physics
Volume56
Issue number1
DOIs
Publication statusPublished - Jan 1 2017

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Plasmas
profiles
Carrier concentration
simulation
Electrodes
Electron temperature
plasma potentials
electrodes
plateaus
Ions
electron energy
slopes
ions

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation. / Chen, Kuan Chen; Chiu, Kuo Feng; Ogiwara, Kohei; Su, Li Wen; Uchino, Kiichiro; Kawai, Yoshinobu.

In: Japanese Journal of Applied Physics, Vol. 56, No. 1, 01AC05, 01.01.2017.

Research output: Contribution to journalArticle

Chen, Kuan Chen ; Chiu, Kuo Feng ; Ogiwara, Kohei ; Su, Li Wen ; Uchino, Kiichiro ; Kawai, Yoshinobu. / Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation. In: Japanese Journal of Applied Physics. 2017 ; Vol. 56, No. 1.
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