Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation

Kuan Chen Chen, Kuo Feng Chiu, Kohei Ogiwara, Li Wen Su, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Study of spatial profiles of capacitively coupled VHF H2 plasma by simulation'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy