Study of the effect of a probe on the plasma in the source region of an electron cyclotron resonance discharge

M. D. Bowden, F. Kimura, H. Muta, K. Uchino, K. Muraoka

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Langmuir probes are commonly used to measure electron density and temperature in the low temperature and low density plasmas used in plasma processing, although the plasma conditions are sometimes not ideal for such measurements. We report measurements of the perturbing effect of such probes in the high magnetic field region of an electron cyclotron resonance discharge by making Thomson scattering measurements of electron temperature and density under normal operating conditions and also in the presence of a probe. The results revealed that the probe clearly qualitatively changed the plasma. An attempt to quantify this change appeared to indicate that the effect of the probe was to decrease the electron density and increase the electron temperature in the vicinity of the probe.

Original languageEnglish
Pages (from-to)2893-2896
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume11
Issue number6
DOIs
Publication statusPublished - Nov 1993

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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