Study on electron density dependence of metastable Ar+ density in pulsed-discharge plasma by using LIF method

Yukio Watanabe, Masaharu Shiratani, Sukeomi Ogi, Naoki Kunihiro

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The dependence of the Ar+ metastable density nd(3d4F7/2) on the electron density ne and its radial profile were studied in the range ne=1014∼1015 cm-3 by using the LIF method in an Ar pulsed-discharge plasma. The measured LIF intensity was strongly affected by electron collisional quenching. The corrected LIF intensity was proportional to both the n(3d4F7/2) estimated by a C–R model and the measured ne. Its radial profile agrees fairly well with the ne measured by a double-probe.

Original languageEnglish
Pages (from-to)184-185
Number of pages2
JournalJapanese Journal of Applied Physics
Volume26
Issue number1 R
DOIs
Publication statusPublished - Jan 1987

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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