Study on fabrication of micrometer patterned ceramic sheet with micro powder imprinting (μPI) method

Yang Xu, Fujio Tsumori, Hyun Goo Kang, Hideshi Miura

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The ceramic thin sheet with micrometer scale 3D patterns may be used widely in the field of Micro Electro Mechanical Systems and we improved a new method of micro powder imprinting to fabricate the thin sheet with the powder of zirconia nanometer scale powder. The micrometer scale line and space patterns from 5 μm to 1 mm were imprinted on ceramic sheets at the binder's glassy state temperature with three kinds of mold in order to remove the mold from 400 μm ceramic sheets. In debinding and sintering steps, effects of parameters such as heating and cooling ratio, temperature of sintering on the final sample's mechanical properties such as the flatness of sheet, porosity and hardness will be investigated and discussed. Finally, we employed the 300 μm thick ceramic sheets with micro patterns fabricated by the μPI method for the electrolyte for solid oxide fuel cell.

Original languageEnglish
Pages (from-to)170-173
Number of pages4
JournalAdvanced Science Letters
Volume12
DOIs
Publication statusPublished - Jun 2012

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Health(social science)
  • Mathematics(all)
  • Education
  • Environmental Science(all)
  • Engineering(all)
  • Energy(all)

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