Study on initial growth of particles in low-pressure and low-power GeH4 RF discharges using the high-sensitivity photon-counting laser-light-scattering method

Hiroharu Kawasaki, Kazutaka Sakamoto, Shinichi Maeda, Tsuyoshi Fukuzawa, Masaharu Shiratani, Yukio Watanabe

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A high-sensitivity photon-counting laser-light-scattering method is applied to obtain information on initial growth of particles formed in low pressure and low power GeH4 RF discharges. Particles of about 1 nm in size are detected principally around the plasma/sheath boundary near the RF electrode at an early time of 0.2 s after the discharge initiation and the corresponding particle density of 2 × 1011 cm-3 is about two orders of magnitude higher than ion density. Spatial profiles of particle amount are very similar to those of Ge emission intensity, which indicates a radical production rate. These results suggest that short-lifetime radicals such as GeH2, having a high production rate, are candidates for key species contributing to the nucleation and initial growth of particles, even for a low pressure (8-13 Pa) and a low power density (0.04 W/cm2). Furthermore, surface reflection probabilities of particles 1-12 nm in size, measured after RF-power-off, are found to be more than 80%.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume37
Issue number10 SUPPL. B
Publication statusPublished - Oct 15 1998

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Light scattering
counting
light scattering
Photons
low pressure
Plasma sheaths
Lasers
sensitivity
photons
lasers
Nucleation
Electrodes
Ions
plasma sheaths
radiant flux density
nucleation
life (durability)
electrodes
profiles

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Study on initial growth of particles in low-pressure and low-power GeH4 RF discharges using the high-sensitivity photon-counting laser-light-scattering method. / Kawasaki, Hiroharu; Sakamoto, Kazutaka; Maeda, Shinichi; Fukuzawa, Tsuyoshi; Shiratani, Masaharu; Watanabe, Yukio.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 37, No. 10 SUPPL. B, 15.10.1998.

Research output: Contribution to journalArticle

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AU - Maeda, Shinichi

AU - Fukuzawa, Tsuyoshi

AU - Shiratani, Masaharu

AU - Watanabe, Yukio

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