Study on initial growth of particles in low-pressure and low-power GeH4 RF discharges using the high-sensitivity photon-counting laser-light-scattering method

Hiroharu Kawasaki, Kazutaka Sakamoto, Shinichi Maeda, Tsuyoshi Fukuzawa, Masaharu Shiratani, Yukio Watanabe

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A high-sensitivity photon-counting laser-light-scattering method is applied to obtain information on initial growth of particles formed in low pressure and low power GeH4 RF discharges. Particles of about 1 nm in size are detected principally around the plasma/sheath boundary near the RF electrode at an early time of 0.2 s after the discharge initiation and the corresponding particle density of 2 × 1011 cm-3 is about two orders of magnitude higher than ion density. Spatial profiles of particle amount are very similar to those of Ge emission intensity, which indicates a radical production rate. These results suggest that short-lifetime radicals such as GeH2, having a high production rate, are candidates for key species contributing to the nucleation and initial growth of particles, even for a low pressure (8-13 Pa) and a low power density (0.04 W/cm2). Furthermore, surface reflection probabilities of particles 1-12 nm in size, measured after RF-power-off, are found to be more than 80%.

Original languageEnglish
Pages (from-to)L1264-L1267
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume37
Issue number10 SUPPL. B
DOIs
Publication statusPublished - Oct 15 1998

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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