Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, Yusuke Fukuta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013
Pages540-544
Number of pages5
Publication statusPublished - Dec 26 2013
Externally publishedYes
Event28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013 - St. Paul, MN, United States
Duration: Oct 20 2013Oct 25 2013

Publication series

NameProceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013

Other

Other28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013
CountryUnited States
CitySt. Paul, MN
Period10/20/1310/25/13

All Science Journal Classification (ASJC) codes

  • Geochemistry and Petrology

Cite this

Hayashi, T., Michihata, M., Takaya, Y., & Fukuta, Y. (2013). Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon. In Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013 (pp. 540-544). (Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013).