Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon

Terutake Hayashi; Masaki Michihata; Yasuhiro Takaya; Yusuke Fukuta

Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, Yusuke Fukuta

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013
Pages	540-544
Number of pages	5
Publication status	Published - Dec 26 2013
Externally published	Yes
Event	28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013 - St. Paul, MN, United States Duration: Oct 20 2013 → Oct 25 2013

Publication series

Name	Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013

Other

Other	28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013
Country/Territory	United States
City	St. Paul, MN
Period	10/20/13 → 10/25/13

All Science Journal Classification (ASJC) codes

Geochemistry and Petrology

Cite this

Hayashi, T., Michihata, M., Takaya, Y., & Fukuta, Y. (2013). Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon. In Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013 (pp. 540-544). (Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013).

Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon. / Hayashi, Terutake; Michihata, Masaki; Takaya, Yasuhiro et al.

Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013. 2013. p. 540-544 (Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hayashi, T, Michihata, M, Takaya, Y & Fukuta, Y 2013, Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon. in Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013. Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013, pp. 540-544, 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013, St. Paul, MN, United States, 10/20/13.

Hayashi T, Michihata M, Takaya Y, Fukuta Y. Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon. In Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013. 2013. p. 540-544. (Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013).

Hayashi, Terutake ; Michihata, Masaki ; Takaya, Yasuhiro et al. / Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon. Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013. 2013. pp. 540-544 (Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013).

@inproceedings{bb4e0afbc8c74fe99ebbbdda30251d17,

title = "Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon",

author = "Terutake Hayashi and Masaki Michihata and Yasuhiro Takaya and Yusuke Fukuta",

year = "2013",

month = dec,

day = "26",

language = "English",

isbn = "9781887706636",

series = "Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013",

pages = "540--544",

booktitle = "Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013",

note = "28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013 ; Conference date: 20-10-2013 Through 25-10-2013",

}

TY - GEN

T1 - Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon

AU - Hayashi, Terutake

AU - Michihata, Masaki

AU - Takaya, Yasuhiro

AU - Fukuta, Yusuke

PY - 2013/12/26

Y1 - 2013/12/26

UR - http://www.scopus.com/inward/record.url?scp=84890851817&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84890851817&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84890851817

SN - 9781887706636

T3 - Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013

SP - 540

EP - 544

BT - Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013

T2 - 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013

Y2 - 20 October 2013 through 25 October 2013

ER -

Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon

Publication series

Other

All Science Journal Classification (ASJC) codes

Other files and links

Cite this