Successful optical MEMS and their applications

Renshi Sawada

    Research output: Contribution to conferencePaperpeer-review

    Abstract

    Optical MEMS is one of the most promising and successful targets of the application of MEMS technology, and various kinds of categories have been developing in this field. Some of the topics presented herein include analogue mirrors and sensors such as displacement sensors. As usual, packaging and bonding technologies are also hot topics. Other new topics discussed in this field include sensors in living biological tissue.

    Original languageEnglish
    Pages1603-1606
    Number of pages4
    Publication statusPublished - Dec 1 2010
    Event17th International Display Workshops, IDW'10 - Fukuoka, Japan
    Duration: Dec 1 2010Dec 3 2010

    Other

    Other17th International Display Workshops, IDW'10
    Country/TerritoryJapan
    CityFukuoka
    Period12/1/1012/3/10

    All Science Journal Classification (ASJC) codes

    • Computer Vision and Pattern Recognition
    • Human-Computer Interaction

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