Successful optical MEMS and their applications

Renshi Sawada

Research output: Contribution to conferencePaper

Abstract

Optical MEMS is one of the most promising and successful targets of the application of MEMS technology, and various kinds of categories have been developing in this field. Some of the topics presented herein include analogue mirrors and sensors such as displacement sensors. As usual, packaging and bonding technologies are also hot topics. Other new topics discussed in this field include sensors in living biological tissue.

Original languageEnglish
Pages1603-1606
Number of pages4
Publication statusPublished - Dec 1 2010
Event17th International Display Workshops, IDW'10 - Fukuoka, Japan
Duration: Dec 1 2010Dec 3 2010

Other

Other17th International Display Workshops, IDW'10
CountryJapan
CityFukuoka
Period12/1/1012/3/10

Fingerprint

MOEMS
Sensors
MEMS
Packaging
Tissue

All Science Journal Classification (ASJC) codes

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction

Cite this

Sawada, R. (2010). Successful optical MEMS and their applications. 1603-1606. Paper presented at 17th International Display Workshops, IDW'10, Fukuoka, Japan.

Successful optical MEMS and their applications. / Sawada, Renshi.

2010. 1603-1606 Paper presented at 17th International Display Workshops, IDW'10, Fukuoka, Japan.

Research output: Contribution to conferencePaper

Sawada, R 2010, 'Successful optical MEMS and their applications' Paper presented at 17th International Display Workshops, IDW'10, Fukuoka, Japan, 12/1/10 - 12/3/10, pp. 1603-1606.
Sawada R. Successful optical MEMS and their applications. 2010. Paper presented at 17th International Display Workshops, IDW'10, Fukuoka, Japan.
Sawada, Renshi. / Successful optical MEMS and their applications. Paper presented at 17th International Display Workshops, IDW'10, Fukuoka, Japan.4 p.
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