Super low-temperature formation of polycrystalline silicon films on plastic substrates by underwater laser annealing

Emi Machida; Masahiro Horita; Yasuaki Ishikawa; Yukiharu Uraoka; Tetsuo Okuyama; Hiroshi Ikenoue

Super low-temperature formation of polycrystalline silicon films on plastic substrates by underwater laser annealing

Emi Machida, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka, Tetsuo Okuyama, Hiroshi Ikenoue

Faculty of Information Science and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We succeeded in the super low-temperature crystallization to high-quality poly-Si films on plastic substrates by underwater laser annealing (WLA). WLA enhances the energy margin twice as high as that in laser annealing in air (LA). Moreover, the crystallinity of WLA poly-Si was much better than that of LA poly-Si.

Original language	English
Title of host publication	Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012
Pages	251-254
Number of pages	4
Volume	1
Publication status	Published - Dec 1 2012
Event	19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012 - Kyoto, Japan Duration: Dec 4 2012 → Dec 7 2012

Other

Other	19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012
Country	Japan
City	Kyoto
Period	12/4/12 → 12/7/12

All Science Journal Classification (ASJC) codes

Computer Vision and Pattern Recognition
Human-Computer Interaction
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Radiology Nuclear Medicine and imaging

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Super low-temperature formation of polycrystalline silicon films on plastic substrates by underwater laser annealing. / Machida, Emi; Horita, Masahiro; Ishikawa, Yasuaki; Uraoka, Yukiharu; Okuyama, Tetsuo; Ikenoue, Hiroshi.

Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012. Vol. 1 2012. p. 251-254.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Machida, E, Horita, M, Ishikawa, Y, Uraoka, Y, Okuyama, T & Ikenoue, H 2012, Super low-temperature formation of polycrystalline silicon films on plastic substrates by underwater laser annealing. in Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012. vol. 1, pp. 251-254, 19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, Kyoto, Japan, 12/4/12.

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abstract = "We succeeded in the super low-temperature crystallization to high-quality poly-Si films on plastic substrates by underwater laser annealing (WLA). WLA enhances the energy margin twice as high as that in laser annealing in air (LA). Moreover, the crystallinity of WLA poly-Si was much better than that of LA poly-Si.",

author = "Emi Machida and Masahiro Horita and Yasuaki Ishikawa and Yukiharu Uraoka and Tetsuo Okuyama and Hiroshi Ikenoue",

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AU - Uraoka, Yukiharu

AU - Okuyama, Tetsuo

AU - Ikenoue, Hiroshi

PY - 2012/12/1

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N2 - We succeeded in the super low-temperature crystallization to high-quality poly-Si films on plastic substrates by underwater laser annealing (WLA). WLA enhances the energy margin twice as high as that in laser annealing in air (LA). Moreover, the crystallinity of WLA poly-Si was much better than that of LA poly-Si.

AB - We succeeded in the super low-temperature crystallization to high-quality poly-Si films on plastic substrates by underwater laser annealing (WLA). WLA enhances the energy margin twice as high as that in laser annealing in air (LA). Moreover, the crystallinity of WLA poly-Si was much better than that of LA poly-Si.

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