Surface micromachining via solid electrochemical reaction on oxide ion conductors

Kai Kamada, Shodai Hirata, Naoya Enomoto, Junichi Hojo

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We propose a simple and novel route for the surface microstructuring of tough materials (glassy carbon, SiC, W and Mo) through a solid electrochemical reaction at a microcontact between the oxide ion conductor and target substrate. More specifically, the surface of materials was locally oxidized by an anodic electrochemical reaction with the oxide ion conductor via the microcontact under a dc bias. Since the oxidation products of the targets were gaseous or sublimable, a fine-patterned surface was obtained as a result of the continuous consumption of the oxidation products formed at the microcontact. The success of the proposed method may stimulate such conventional applications of oxide ion conductors.

Original languageEnglish
Pages (from-to)1226-1230
Number of pages5
JournalSolid State Ionics
Volume180
Issue number20-22
DOIs
Publication statusPublished - Aug 17 2009

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All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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