A new technique of micro/nanoscale temperature measurement is developed using an individual carbon nanotube (CNT) on a platinum hot-film, which can control the heat flow through the CNT probe and sense its own average temperature. A feedback control to extinct the heat flow enables us to neglect the effect of contact thermal resistance and to know the real surface temperature. Spatial resolution of 70 nm, temperature uncertainty of less than 0.5 K and enough robustness are achieved. Using this method, quantitative temperature profiles are obtained around a line heater of 604 nm-width and 9.73 μm-length.
|Number of pages||9|
|Journal||Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B|
|Publication status||Published - 2013|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Mechanical Engineering