Synthesis of AlN from Li3N and Al: Application to vapor phase epitaxy

Tatsuhito Wakigawa, Toshihiko Nagano, Yoshihiro Kangawa, Koichi Kakimoto

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We performed synthesis of AlN using Al and Li3N. In this method, there are two problems that must be solved for obtaining single-phase AlN. One of them is suppression of Li3AlN2 formation and the other is precipitation of LiAl from the residual source materials during the cooling process. In the present work, we analyzed phase stability of products and found that AlN was stable at high temperatures and low Li-N/Al molar ratios. However, the products still contained LiAl and Al. Therefore, we examined the effectiveness of vapor phase epitaxy for separating AlN from the extra phase (LiAl and Al formed from residual source materials). From the experimental results, feasibility of vapor phase epitaxy was confirmed. That is, we can deposit only an AlN layer on a sapphire substrate by optimizing the growth conditions, i.e., temperature range above 1150 °C and Li-N/Al molar ratio less than 1.

Original languageEnglish
Pages (from-to)2827-2831
Number of pages5
JournalJournal of Crystal Growth
Volume310
Issue number11
DOIs
Publication statusPublished - May 15 2008

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Vapor phase epitaxy
vapor phase epitaxy
Phase stability
Aluminum Oxide
synthesis
products
Sapphire
sapphire
Deposits
deposits
retarding
Cooling
cooling
Temperature
Substrates
temperature

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this

Synthesis of AlN from Li3N and Al : Application to vapor phase epitaxy. / Wakigawa, Tatsuhito; Nagano, Toshihiko; Kangawa, Yoshihiro; Kakimoto, Koichi.

In: Journal of Crystal Growth, Vol. 310, No. 11, 15.05.2008, p. 2827-2831.

Research output: Contribution to journalArticle

Wakigawa, Tatsuhito ; Nagano, Toshihiko ; Kangawa, Yoshihiro ; Kakimoto, Koichi. / Synthesis of AlN from Li3N and Al : Application to vapor phase epitaxy. In: Journal of Crystal Growth. 2008 ; Vol. 310, No. 11. pp. 2827-2831.
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