@article{47008c6f5f1b47e8989c053f8f5b6138,
title = "Synthesis of Al2O3 coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)3 ",
abstract = "Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).",
author = "Rong Tu and Yang Yuan and Litong Guo and Jun Li and Song Zhang and Meijun Yang and Qizhong Li and Lianmeng Zhang and Takashi Goto and Hitoshi Ohmori and Ji Shi and Haiwen Li",
note = "Funding Information: This work was supported by the Science Challenge Project (No.TZ2016001), the National Natural Science Foundation of China (Nos. 51372188, 11602251, 51521001, 51861145306 and 51872212), and the 111 Project (B13035), and Joint Fund of Ministry of Education for Pre-research of Equipment (6141A02022257). This research was also supported by the International Science & Technology Cooperation Program of China (2014DFA53090, SQ2018YFGH000001), the Natural Science Foundation of Hubei Province, China (2016CFA006), the Fundamental Research Funds for the Central Universities (WUT: 2017YB004, 2018YS003, 2019III030, 2019III028), and the State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (WUT, Grant No. 2019-KF-12).",
year = "2019",
month = nov,
day = "1",
doi = "10.1111/ijac.13255",
language = "English",
volume = "16",
pages = "2265--2272",
journal = "International Journal of Applied Ceramic Technology",
issn = "1546-542X",
publisher = "Wiley-Blackwell",
number = "6",
}