Synthesis of Al2O3 coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)3

Rong Tu; Yang Yuan; Litong Guo; Jun Li; Song Zhang; Meijun Yang; Qizhong Li; Lianmeng Zhang; Takashi Goto; Hitoshi Ohmori; Ji Shi; Haiwen Li

doi:10.1111/ijac.13255

Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃

Rong Tu, Yang Yuan, Litong Guo, Jun Li, Song Zhang, Meijun Yang, Qizhong Li, Lianmeng Zhang, Takashi Goto, Hitoshi Ohmori, Ji Shi, Haiwen Li

Kyushu University Platform of Inter/Transdisciplinary Energy Research

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Abstract

Aluminum acetylacetonate (Al(acac)₃) was used as a precursor to synthesize aluminum oxide (Al₂O₃) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al₂O₃ coatings transformed from γ phase to δ phase and α phase and as microwave power (p_M) and total pressure (P_tot) increased. The effects of p_M and P_tot on the microstructure of the Al₂O₃ coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at p_M = 1.0-1.2 kW and P_tot = 400 Pa exhibited good adhesion strength (Class 1).

Original language	English
Pages (from-to)	2265-2272
Number of pages	8
Journal	International Journal of Applied Ceramic Technology
Volume	16
Issue number	6
DOIs	https://doi.org/10.1111/ijac.13255
Publication status	Published - Nov 1 2019

All Science Journal Classification (ASJC) codes

Ceramics and Composites
Condensed Matter Physics
Marketing
Materials Chemistry

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Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃ . / Tu, Rong; Yuan, Yang; Guo, Litong; Li, Jun; Zhang, Song; Yang, Meijun; Li, Qizhong; Zhang, Lianmeng; Goto, Takashi; Ohmori, Hitoshi; Shi, Ji; Li, Haiwen.

In: International Journal of Applied Ceramic Technology, Vol. 16, No. 6, 01.11.2019, p. 2265-2272.

Research output: Contribution to journal › Article › peer-review

Tu, Rong ; Yuan, Yang ; Guo, Litong ; Li, Jun ; Zhang, Song ; Yang, Meijun ; Li, Qizhong ; Zhang, Lianmeng ; Goto, Takashi ; Ohmori, Hitoshi ; Shi, Ji ; Li, Haiwen. / Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃ In: International Journal of Applied Ceramic Technology. 2019 ; Vol. 16, No. 6. pp. 2265-2272.

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title = "Synthesis of Al2O3 coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)3 ",

abstract = "Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).",

author = "Rong Tu and Yang Yuan and Litong Guo and Jun Li and Song Zhang and Meijun Yang and Qizhong Li and Lianmeng Zhang and Takashi Goto and Hitoshi Ohmori and Ji Shi and Haiwen Li",

note = "Funding Information: This work was supported by the Science Challenge Project (No.TZ2016001), the National Natural Science Foundation of China (Nos. 51372188, 11602251, 51521001, 51861145306 and 51872212), and the 111 Project (B13035), and Joint Fund of Ministry of Education for Pre-research of Equipment (6141A02022257). This research was also supported by the International Science & Technology Cooperation Program of China (2014DFA53090, SQ2018YFGH000001), the Natural Science Foundation of Hubei Province, China (2016CFA006), the Fundamental Research Funds for the Central Universities (WUT: 2017YB004, 2018YS003, 2019III030, 2019III028), and the State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (WUT, Grant No. 2019-KF-12). Publisher Copyright: {\textcopyright} 2019 The American Ceramic Society",

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doi = "10.1111/ijac.13255",

language = "English",

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AU - Tu, Rong

AU - Yuan, Yang

AU - Guo, Litong

AU - Li, Jun

AU - Zhang, Song

AU - Yang, Meijun

AU - Li, Qizhong

AU - Zhang, Lianmeng

AU - Goto, Takashi

AU - Ohmori, Hitoshi

AU - Shi, Ji

AU - Li, Haiwen

N1 - Funding Information: This work was supported by the Science Challenge Project (No.TZ2016001), the National Natural Science Foundation of China (Nos. 51372188, 11602251, 51521001, 51861145306 and 51872212), and the 111 Project (B13035), and Joint Fund of Ministry of Education for Pre-research of Equipment (6141A02022257). This research was also supported by the International Science & Technology Cooperation Program of China (2014DFA53090, SQ2018YFGH000001), the Natural Science Foundation of Hubei Province, China (2016CFA006), the Fundamental Research Funds for the Central Universities (WUT: 2017YB004, 2018YS003, 2019III030, 2019III028), and the State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (WUT, Grant No. 2019-KF-12). Publisher Copyright: © 2019 The American Ceramic Society

PY - 2019/11/1

Y1 - 2019/11/1

N2 - Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).

AB - Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).

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Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃

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