Synthesis of Al2O3 coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)3

Rong Tu, Yang Yuan, Litong Guo, Jun Li, Song Zhang, Meijun Yang, Qizhong Li, Lianmeng Zhang, Takashi Goto, Hitoshi Ohmori, Ji Shi, Haiwen Li

Research output: Contribution to journalArticle

Abstract

Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).

Original languageEnglish
Pages (from-to)2265-2272
Number of pages8
JournalInternational Journal of Applied Ceramic Technology
Volume16
Issue number6
DOIs
Publication statusPublished - Nov 1 2019

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All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Condensed Matter Physics
  • Marketing
  • Materials Chemistry

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