Synthesis of Al2O3 coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)3

Rong Tu; Yang Yuan; Litong Guo; Jun Li; Song Zhang; Meijun Yang; Qizhong Li; Lianmeng Zhang; Takashi Goto; Hitoshi Ohmori; Ji Shi; Haiwen Li

doi:10.1111/ijac.13255

Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃

Rong Tu, Yang Yuan, Litong Guo, Jun Li, Song Zhang, Meijun Yang, Qizhong Li, Lianmeng Zhang, Takashi Goto, Hitoshi Ohmori, Ji Shi, Haiwen Li

Platform of Inter/Transdisciplinary Energy Research (Q-PIT)

Research output: Contribution to journal › Article

Abstract

Aluminum acetylacetonate (Al(acac)₃) was used as a precursor to synthesize aluminum oxide (Al₂O₃) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al₂O₃ coatings transformed from γ phase to δ phase and α phase and as microwave power (p_M) and total pressure (P_tot) increased. The effects of p_M and P_tot on the microstructure of the Al₂O₃ coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at p_M = 1.0-1.2 kW and P_tot = 400 Pa exhibited good adhesion strength (Class 1).

Original language	English
Pages (from-to)	2265-2272
Number of pages	8
Journal	International Journal of Applied Ceramic Technology
Volume	16
Issue number	6
DOIs	https://doi.org/10.1111/ijac.13255
Publication status	Published - Nov 1 2019

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All Science Journal Classification (ASJC) codes

Ceramics and Composites
Condensed Matter Physics
Marketing
Materials Chemistry

Cite this

Tu, R., Yuan, Y., Guo, L., Li, J., Zhang, S., Yang, M., ... Li, H. (2019). Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃ International Journal of Applied Ceramic Technology, 16(6), 2265-2272. https://doi.org/10.1111/ijac.13255

Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃ . / Tu, Rong; Yuan, Yang; Guo, Litong; Li, Jun; Zhang, Song; Yang, Meijun; Li, Qizhong; Zhang, Lianmeng; Goto, Takashi; Ohmori, Hitoshi; Shi, Ji; Li, Haiwen.

In: International Journal of Applied Ceramic Technology, Vol. 16, No. 6, 01.11.2019, p. 2265-2272.

Research output: Contribution to journal › Article

Tu, Rong ; Yuan, Yang ; Guo, Litong ; Li, Jun ; Zhang, Song ; Yang, Meijun ; Li, Qizhong ; Zhang, Lianmeng ; Goto, Takashi ; Ohmori, Hitoshi ; Shi, Ji ; Li, Haiwen. / Synthesis of Al₂O₃ coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)₃ In: International Journal of Applied Ceramic Technology. 2019 ; Vol. 16, No. 6. pp. 2265-2272.

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abstract = "Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).",

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AU - Yang, Meijun

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AU - Zhang, Lianmeng

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AB - Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).

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10.1111/ijac.13255