Synthesis of diamond fine particles on levitated seed particles in a rf CH 4/H 2 plasma chamber equipped with a hot filament

S. Shimizu; T. Shimizu; H. M. Thomas; G. Matern; R. W. Stark; M. Balden; S. Lindig; Y. Watanabe; W. Jacob; N. Sato; G. E. Morfill

doi:10.1063/1.4755803

Synthesis of diamond fine particles on levitated seed particles in a rf CH ₄/H ₂ plasma chamber equipped with a hot filament

S. Shimizu, T. Shimizu, H. M. Thomas, G. Matern, R. W. Stark, M. Balden, S. Lindig, Y. Watanabe, W. Jacob, N. Sato, G. E. Morfill

Research output: Contribution to journal › Article

Abstract

The first successful growth of diamond layers on levitated seed particles in CH ₄/H ₂ plasma is presented. The particles were grown in a rf CH ₄/H ₂ plasma chamber equipped with a tungsten hot filament. The seed diamond particles injected in a plasma are negatively charged and levitated under the balance of several forces, and diamond chemical vapor deposition takes place on them. The SEM images show that the crystalline structures are formed after the coagulation of islands. The micro-Raman spectroscopy of the particle grown after several hours shows the clear peak assigned to diamond.

Original language	English
Article number	073303
Journal	Journal of Applied Physics
Volume	112
Issue number	7
DOIs	https://doi.org/10.1063/1.4755803
Publication status	Published - Oct 1 2012
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.4755803

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Shimizu, S., Shimizu, T., Thomas, H. M., Matern, G., Stark, R. W., Balden, M., Lindig, S., Watanabe, Y., Jacob, W., Sato, N., & Morfill, G. E. (2012). Synthesis of diamond fine particles on levitated seed particles in a rf CH ₄/H ₂ plasma chamber equipped with a hot filament. Journal of Applied Physics, 112(7), [073303]. https://doi.org/10.1063/1.4755803

Synthesis of diamond fine particles on levitated seed particles in a rf CH ₄/H ₂ plasma chamber equipped with a hot filament. / Shimizu, S.; Shimizu, T.; Thomas, H. M.; Matern, G.; Stark, R. W.; Balden, M.; Lindig, S.; Watanabe, Y.; Jacob, W.; Sato, N.; Morfill, G. E.

In: Journal of Applied Physics, Vol. 112, No. 7, 073303, 01.10.2012.

Research output: Contribution to journal › Article

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abstract = "The first successful growth of diamond layers on levitated seed particles in CH 4/H 2 plasma is presented. The particles were grown in a rf CH 4/H 2 plasma chamber equipped with a tungsten hot filament. The seed diamond particles injected in a plasma are negatively charged and levitated under the balance of several forces, and diamond chemical vapor deposition takes place on them. The SEM images show that the crystalline structures are formed after the coagulation of islands. The micro-Raman spectroscopy of the particle grown after several hours shows the clear peak assigned to diamond.",

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AU - Matern, G.

AU - Stark, R. W.

AU - Balden, M.

AU - Lindig, S.

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AU - Jacob, W.

AU - Sato, N.

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