Synthesis of diamond fine particles on levitated seed particles in a rf CH 4/H 2 plasma chamber equipped with a hot filament

S. Shimizu; T. Shimizu; H. M. Thomas; G. Matern; R. W. Stark; M. Balden; S. Lindig; Y. Watanabe; W. Jacob; N. Sato; G. E. Morfill

doi:10.1063/1.4755803

Synthesis of diamond fine particles on levitated seed particles in a rf CH ₄/H ₂ plasma chamber equipped with a hot filament

S. Shimizu, T. Shimizu, H. M. Thomas, G. Matern, R. W. Stark, M. Balden, S. Lindig, Y. Watanabe, W. Jacob, N. Sato, G. E. Morfill

Condensed Matter Physics

Research output: Contribution to journal › Article › peer-review

Abstract

The first successful growth of diamond layers on levitated seed particles in CH ₄/H ₂ plasma is presented. The particles were grown in a rf CH ₄/H ₂ plasma chamber equipped with a tungsten hot filament. The seed diamond particles injected in a plasma are negatively charged and levitated under the balance of several forces, and diamond chemical vapor deposition takes place on them. The SEM images show that the crystalline structures are formed after the coagulation of islands. The micro-Raman spectroscopy of the particle grown after several hours shows the clear peak assigned to diamond.

Original language	English
Article number	073303
Journal	Journal of Applied Physics
Volume	112
Issue number	7
DOIs	https://doi.org/10.1063/1.4755803
Publication status	Published - Oct 1 2012

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

Access to Document

10.1063/1.4755803

Cite this

@article{2649f69cd9c4449b9da65744756d208a,

title = "Synthesis of diamond fine particles on levitated seed particles in a rf CH 4/H 2 plasma chamber equipped with a hot filament",

abstract = "The first successful growth of diamond layers on levitated seed particles in CH 4/H 2 plasma is presented. The particles were grown in a rf CH 4/H 2 plasma chamber equipped with a tungsten hot filament. The seed diamond particles injected in a plasma are negatively charged and levitated under the balance of several forces, and diamond chemical vapor deposition takes place on them. The SEM images show that the crystalline structures are formed after the coagulation of islands. The micro-Raman spectroscopy of the particle grown after several hours shows the clear peak assigned to diamond.",

author = "S. Shimizu and T. Shimizu and Thomas, {H. M.} and G. Matern and Stark, {R. W.} and M. Balden and S. Lindig and Y. Watanabe and W. Jacob and N. Sato and Morfill, {G. E.}",

year = "2012",

month = oct,

day = "1",

doi = "10.1063/1.4755803",

language = "English",

volume = "112",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "7",

}

TY - JOUR

T1 - Synthesis of diamond fine particles on levitated seed particles in a rf CH 4/H 2 plasma chamber equipped with a hot filament

AU - Shimizu, S.

AU - Shimizu, T.

AU - Thomas, H. M.

AU - Matern, G.

AU - Stark, R. W.

AU - Balden, M.

AU - Lindig, S.

AU - Watanabe, Y.

AU - Jacob, W.

AU - Sato, N.

AU - Morfill, G. E.

PY - 2012/10/1

Y1 - 2012/10/1

N2 - The first successful growth of diamond layers on levitated seed particles in CH 4/H 2 plasma is presented. The particles were grown in a rf CH 4/H 2 plasma chamber equipped with a tungsten hot filament. The seed diamond particles injected in a plasma are negatively charged and levitated under the balance of several forces, and diamond chemical vapor deposition takes place on them. The SEM images show that the crystalline structures are formed after the coagulation of islands. The micro-Raman spectroscopy of the particle grown after several hours shows the clear peak assigned to diamond.

AB - The first successful growth of diamond layers on levitated seed particles in CH 4/H 2 plasma is presented. The particles were grown in a rf CH 4/H 2 plasma chamber equipped with a tungsten hot filament. The seed diamond particles injected in a plasma are negatively charged and levitated under the balance of several forces, and diamond chemical vapor deposition takes place on them. The SEM images show that the crystalline structures are formed after the coagulation of islands. The micro-Raman spectroscopy of the particle grown after several hours shows the clear peak assigned to diamond.

UR - http://www.scopus.com/inward/record.url?scp=84867506595&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84867506595&partnerID=8YFLogxK

U2 - 10.1063/1.4755803

DO - 10.1063/1.4755803

M3 - Article

AN - SCOPUS:84867506595

VL - 112

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 7

M1 - 073303

ER -

Synthesis of diamond fine particles on levitated seed particles in a rf CH ₄/H ₂ plasma chamber equipped with a hot filament

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this