Synthesis of diamond fine particles on levitated seed particles in a rf CH 4/H 2 plasma chamber equipped with a hot filament

S. Shimizu, T. Shimizu, H. M. Thomas, G. Matern, R. W. Stark, M. Balden, S. Lindig, Y. Watanabe, W. Jacob, N. Sato, G. E. Morfill

Research output: Contribution to journalArticle

Abstract

The first successful growth of diamond layers on levitated seed particles in CH 4/H 2 plasma is presented. The particles were grown in a rf CH 4/H 2 plasma chamber equipped with a tungsten hot filament. The seed diamond particles injected in a plasma are negatively charged and levitated under the balance of several forces, and diamond chemical vapor deposition takes place on them. The SEM images show that the crystalline structures are formed after the coagulation of islands. The micro-Raman spectroscopy of the particle grown after several hours shows the clear peak assigned to diamond.

Original languageEnglish
Article number073303
JournalJournal of Applied Physics
Volume112
Issue number7
DOIs
Publication statusPublished - Oct 1 2012
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Shimizu, S., Shimizu, T., Thomas, H. M., Matern, G., Stark, R. W., Balden, M., Lindig, S., Watanabe, Y., Jacob, W., Sato, N., & Morfill, G. E. (2012). Synthesis of diamond fine particles on levitated seed particles in a rf CH 4/H 2 plasma chamber equipped with a hot filament. Journal of Applied Physics, 112(7), [073303]. https://doi.org/10.1063/1.4755803