Synthesis of non-agglomerated nanoparticles by an electrospray assisted chemical vapor deposition (ES-CVD) method

Koichi Nakaso, B. Han, K. H. Ahn, M. Choi, K. Okuyama

Research output: Contribution to journalArticle

70 Citations (Scopus)

Abstract

Non-agglomerated spherical silicon, titanium and zirconium oxide nanoparticles were prepared using an electrospray assisted chemical vapor deposition (ES-CVD) process. Metal alkoxides in conjunction with an electrospray method were used to introduce charged precursors into a CVD reactor. The ions are produced during evaporation of the charged droplets, and they probably act as seed nuclei (i.e., ion-induced nucleation) and/or, they are attached to the produced particles. The experimental results were compared with those obtained using a conventional evaporation CVD method. The particles generated using the conventional evaporation method were agglomerated to a considerable extent irregardless of the type of particle. Whereas, at the same conditions, high concentrations of non-agglomerated nanoparticles having diameters in the range of 10-40 nm were obtained using the ES-CVD method. This appears to be due to the charging effects of the generated particles, that is, the electrostatic dispersion of unipolarly charged particles. The size of the non-agglomerated particles in the ES-CVD method was reduced as the results of the decease in the concentration of precursors introduced by electrospray.

Original languageEnglish
Pages (from-to)869-881
Number of pages13
JournalJournal of Aerosol Science
Volume34
Issue number7
DOIs
Publication statusPublished - Jul 1 2003

Fingerprint

Chemical vapor deposition
Nanoparticles
Evaporation
evaporation
Ions
Titanium oxides
Silicon oxides
Charged particles
ion
Zirconia
Seed
Electrostatics
Nucleation
nucleation
titanium
silicon
Metals
droplet
particle
chemical

All Science Journal Classification (ASJC) codes

  • Environmental Chemistry
  • Materials Science(all)
  • Pollution

Cite this

Synthesis of non-agglomerated nanoparticles by an electrospray assisted chemical vapor deposition (ES-CVD) method. / Nakaso, Koichi; Han, B.; Ahn, K. H.; Choi, M.; Okuyama, K.

In: Journal of Aerosol Science, Vol. 34, No. 7, 01.07.2003, p. 869-881.

Research output: Contribution to journalArticle

Nakaso, Koichi ; Han, B. ; Ahn, K. H. ; Choi, M. ; Okuyama, K. / Synthesis of non-agglomerated nanoparticles by an electrospray assisted chemical vapor deposition (ES-CVD) method. In: Journal of Aerosol Science. 2003 ; Vol. 34, No. 7. pp. 869-881.
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