T1601-2-4 多層膜材へのナノインプリントによる三次元構造の作製(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

不二夫 津守; 卓也 豊岡; 秀俊 小寺

doi:10.1299/jsmemecjo.2009.8.0_251

T1601-2-4 多層膜材へのナノインプリントによる三次元構造の作製(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

Translated title of the contribution: T1601-2-4 There-dimensional structure fabricated by multi layer Nanoimprint

津守不二夫, 豊岡卓也, 小寺秀俊

Manufacturing Process

Research output: Contribution to journal › Article

Abstract

We investigate multi-layered thermal nanoimprint to fabricate 3D-structure. In multi-layered imprinting, the relation between imprint condition and fabricated structure has not been discussed experimentally. In this report, we discuss simple bi-layer imprint experimentally. Bi-layer PMMA resist coated two type molecular weight polymers is pressed in some conditions and observed cross-sectional images. As a result, imprinted structure is affected pressure force and pattern width.

Translated title of the contribution	T1601-2-4 There-dimensional structure fabricated by multi layer Nanoimprint
Original language	Japanese
Pages (from-to)	251-252
Number of pages	2
Journal	年次大会講演論文集
Volume	2009
Issue number	0
DOIs	https://doi.org/10.1299/jsmemecjo.2009.8.0_251
Publication status	Published - 2009

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10.1299/jsmemecjo.2009.8.0_251

https://doi.org/10.1299/jsmemecjo.2009.8.0_251

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title = "T1601-2-4 多層膜材へのナノインプリントによる三次元構造の作製(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))",

abstract = "We investigate multi-layered thermal nanoimprint to fabricate 3D-structure. In multi-layered imprinting, the relation between imprint condition and fabricated structure has not been discussed experimentally. In this report, we discuss simple bi-layer imprint experimentally. Bi-layer PMMA resist coated two type molecular weight polymers is pressed in some conditions and observed cross-sectional images. As a result, imprinted structure is affected pressure force and pattern width.",

author = "不二夫津守 and 卓也豊岡 and 秀俊小寺",

year = "2009",

doi = "10.1299/jsmemecjo.2009.8.0_251",

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AU - 津守, 不二夫

AU - 豊岡, 卓也

AU - 小寺, 秀俊

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AB - We investigate multi-layered thermal nanoimprint to fabricate 3D-structure. In multi-layered imprinting, the relation between imprint condition and fabricated structure has not been discussed experimentally. In this report, we discuss simple bi-layer imprint experimentally. Bi-layer PMMA resist coated two type molecular weight polymers is pressed in some conditions and observed cross-sectional images. As a result, imprinted structure is affected pressure force and pattern width.

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