Abstract
We investigate multi-layered thermal nanoimprint to fabricate 3D-structure. In multi-layered imprinting, the relation between imprint condition and fabricated structure has not been discussed experimentally. In this report, we discuss simple bi-layer imprint experimentally. Bi-layer PMMA resist coated two type molecular weight polymers is pressed in some conditions and observed cross-sectional images. As a result, imprinted structure is affected pressure force and pattern width.
| Translated title of the contribution | T1601-2-4 There-dimensional structure fabricated by multi layer Nanoimprint |
|---|---|
| Original language | Japanese |
| Pages (from-to) | 251-252 |
| Number of pages | 2 |
| Journal | 年次大会講演論文集 |
| Volume | 2009 |
| Issue number | 0 |
| DOIs | |
| Publication status | Published - 2009 |