T1601-2-4 多層膜材へのナノインプリントによる三次元構造の作製(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

Translated title of the contribution: T1601-2-4 There-dimensional structure fabricated by multi layer Nanoimprint

津守 不二夫, 豊岡 卓也, 小寺 秀俊

Research output: Contribution to journalArticle

Abstract

We investigate multi-layered thermal nanoimprint to fabricate 3D-structure. In multi-layered imprinting, the relation between imprint condition and fabricated structure has not been discussed experimentally. In this report, we discuss simple bi-layer imprint experimentally. Bi-layer PMMA resist coated two type molecular weight polymers is pressed in some conditions and observed cross-sectional images. As a result, imprinted structure is affected pressure force and pattern width.
Translated title of the contributionT1601-2-4 There-dimensional structure fabricated by multi layer Nanoimprint
Original languageJapanese
Pages (from-to)251-252
Number of pages2
Journal年次大会講演論文集
Volume2009
Issue number0
DOIs
Publication statusPublished - 2009

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