T1601-2-6 樹脂上金属薄膜への熱ナノインプリント加工(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

佑典 酒井; 不二夫 津守; 秀俊 小寺

doi:10.1299/jsmemecjo.2009.8.0_255

T1601-2-6 樹脂上金属薄膜への熱ナノインプリント加工(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

Translated title of the contribution: T1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates

酒井佑典, 津守不二夫, 小寺秀俊

Manufacturing Process

Research output: Contribution to journal › Article

Abstract

The deforming of thin metal films on PET substrates is studied. Though only polymer substrates are deformed in conventional nanoimprint lithography studies, we pressed metal-polymer composite specimens which may be applied to micro electromagnetic or optical devices. 100 nm Al thin films were deposited on 50 μm PET substrates for specimens. The thin metal films on PET are pressed for loading time t=300, 900, 1800 s with a mold patterned lines. As a result, thin metal films are strained 1.7 % at most.

Translated title of the contribution	T1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates
Original language	Japanese
Pages (from-to)	255-256
Number of pages	2
Journal	年次大会講演論文集
Volume	2009
Issue number	0
DOIs	https://doi.org/10.1299/jsmemecjo.2009.8.0_255
Publication status	Published - 2009

Access to Document

10.1299/jsmemecjo.2009.8.0_255

https://doi.org/10.1299/jsmemecjo.2009.8.0_255

Fingerprint Dive into the research topics of 'T1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates'. Together they form a unique fingerprint.

Cite this

@article{50507e64730d48729cb9ffd359193f6f,

title = "T1601-2-6 樹脂上金属薄膜への熱ナノインプリント加工(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))",

abstract = "The deforming of thin metal films on PET substrates is studied. Though only polymer substrates are deformed in conventional nanoimprint lithography studies, we pressed metal-polymer composite specimens which may be applied to micro electromagnetic or optical devices. 100 nm Al thin films were deposited on 50 μm PET substrates for specimens. The thin metal films on PET are pressed for loading time t=300, 900, 1800 s with a mold patterned lines. As a result, thin metal films are strained 1.7 % at most.",

author = "佑典酒井 and 不二夫津守 and 秀俊小寺",

year = "2009",

doi = "10.1299/jsmemecjo.2009.8.0_255",

language = "Japanese",

volume = "2009",

pages = "255--256",

journal = "年次大会講演論文集",

publisher = "一般社団法人日本機械学会",

number = "0",

}

TY - JOUR

T1 - T1601-2-6 樹脂上金属薄膜への熱ナノインプリント加工(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

AU - 酒井, 佑典

AU - 津守, 不二夫

AU - 小寺, 秀俊

PY - 2009

Y1 - 2009

N2 - The deforming of thin metal films on PET substrates is studied. Though only polymer substrates are deformed in conventional nanoimprint lithography studies, we pressed metal-polymer composite specimens which may be applied to micro electromagnetic or optical devices. 100 nm Al thin films were deposited on 50 μm PET substrates for specimens. The thin metal films on PET are pressed for loading time t=300, 900, 1800 s with a mold patterned lines. As a result, thin metal films are strained 1.7 % at most.

AB - The deforming of thin metal films on PET substrates is studied. Though only polymer substrates are deformed in conventional nanoimprint lithography studies, we pressed metal-polymer composite specimens which may be applied to micro electromagnetic or optical devices. 100 nm Al thin films were deposited on 50 μm PET substrates for specimens. The thin metal films on PET are pressed for loading time t=300, 900, 1800 s with a mold patterned lines. As a result, thin metal films are strained 1.7 % at most.

U2 - 10.1299/jsmemecjo.2009.8.0_255

DO - 10.1299/jsmemecjo.2009.8.0_255

M3 - Article

VL - 2009

SP - 255

EP - 256

JO - 年次大会講演論文集

JF - 年次大会講演論文集

IS - 0

ER -