T1601-2-6 樹脂上金属薄膜への熱ナノインプリント加工(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

Translated title of the contribution: T1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates

酒井 佑典, 津守 不二夫, 小寺 秀俊

Research output: Contribution to journalArticle

Abstract

The deforming of thin metal films on PET substrates is studied. Though only polymer substrates are deformed in conventional nanoimprint lithography studies, we pressed metal-polymer composite specimens which may be applied to micro electromagnetic or optical devices. 100 nm Al thin films were deposited on 50 μm PET substrates for specimens. The thin metal films on PET are pressed for loading time t=300, 900, 1800 s with a mold patterned lines. As a result, thin metal films are strained 1.7 % at most.
Translated title of the contributionT1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates
Original languageJapanese
Pages (from-to)255-256
Number of pages2
Journal年次大会講演論文集
Volume2009
Issue number0
DOIs
Publication statusPublished - 2009

Fingerprint Dive into the research topics of 'T1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates'. Together they form a unique fingerprint.

Cite this