T1601-2-6 樹脂上金属薄膜への熱ナノインプリント加工(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))

Translated title of the contribution: T1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates

酒井 佑典, 津守 不二夫, 小寺 秀俊

Research output: Contribution to journalArticle

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Physics & Astronomy