Technology for MEMS commercialization: Current status and future prospects

Renshi Sawada, Eiji Higurashi

Research output: Contribution to journalReview article

Original languageEnglish
Pages (from-to)491-497
Number of pages7
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume76
Issue number5
DOIs
Publication statusPublished - Jan 1 2010

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All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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