Technology for MEMS commercialization: Current status and future prospects

Renshi Sawada; Eiji Higurashi

doi:10.2493/jjspe.76.491

Technology for MEMS commercialization: Current status and future prospects

Renshi Sawada, Eiji Higurashi

Research output: Contribution to journal › Review article › peer-review

Original language	English
Pages (from-to)	491-497
Number of pages	7
Journal	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume	76
Issue number	5
DOIs	https://doi.org/10.2493/jjspe.76.491
Publication status	Published - May 2010

All Science Journal Classification (ASJC) codes

Mechanical Engineering

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10.2493/jjspe.76.491

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title = "Technology for MEMS commercialization: Current status and future prospects",

author = "Renshi Sawada and Eiji Higurashi",

year = "2010",

month = may,

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Technology for MEMS commercialization: Current status and future prospects

All Science Journal Classification (ASJC) codes

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