TEM/AFM observation of crack tip plasticity in silicon single crystals

Masaki Tanaka, T. Fukui, T. Yamagata, Tatsuya Morikawa, K. Higashida, R. Onodera

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Crack tip plasticity in silicon single crystals has been investigated using both high voltage electron microscopy (HVEM) and atomic force microscopy (AFM). Cracks were introduced into a (001) silicon wafer at room temperature by Vickers indentation method. The specimen temperature was increased to more than 873 K to activate dislocation generation around the crack tip under a residual stress due to the indentation. In specimens without the heat-treatment, no dislocations were observed around the crack, while in specimens with the heat-treatment, characteristic dislocation configurations were observed near the crack tip. AFM observations showed that slip bands were formed around the crack tip in the heat-treated specimens, and that the step heights of those slip bands were around one nanometer. Such crack tip plasticity is considered to be caused by mainly mode I tensile load, and contribute to increasing fracture toughness.

Original languageEnglish
Pages (from-to)1839-1842
Number of pages4
JournalMaterials Transactions
Volume42
Issue number9
DOIs
Publication statusPublished - Jan 1 2001

Fingerprint

crack tips
Silicon
plastic properties
Crack tips
Plasticity
Atomic force microscopy
Single crystals
atomic force microscopy
Transmission electron microscopy
transmission electron microscopy
single crystals
silicon
edge dislocations
indentation
Indentation
heat treatment
cracks
Heat treatment
Cracks
fracture strength

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

TEM/AFM observation of crack tip plasticity in silicon single crystals. / Tanaka, Masaki; Fukui, T.; Yamagata, T.; Morikawa, Tatsuya; Higashida, K.; Onodera, R.

In: Materials Transactions, Vol. 42, No. 9, 01.01.2001, p. 1839-1842.

Research output: Contribution to journalArticle

Tanaka, Masaki ; Fukui, T. ; Yamagata, T. ; Morikawa, Tatsuya ; Higashida, K. ; Onodera, R. / TEM/AFM observation of crack tip plasticity in silicon single crystals. In: Materials Transactions. 2001 ; Vol. 42, No. 9. pp. 1839-1842.
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