Temperature dependence of the scanning performance of an electrostatic microscanner

Noriaki Ishikawa, Kentaro Ikeda, Renshi Sawada

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

An optical microscanner is one examples of an optical-MEMS device, which scans a laser beam across one or two dimensions by reflecting it. The microscanner has a range of applications, such as laser printers, laser displays and bio-medical imaging. For each application, the mirror is required to oscillated at a certain frequency and optical scan angle. However, its scanning performance varies with temperature. To address this issue, the temperature dependence of the natural frequency of a 1D electrostatic microscanner formed of single-crystal silicon is investigated both theorectically and experimentally in this paper. As the temperature rises from 30°C to 80°C, the calculated value of the natural frequency decreased from 1910.81 Hz to 1908.68 Hz, and the experimental value decreased from 2123.85 Hz to 2120.56 Hz. The percentage changes in calculated and experimental results were -0.11% and -0.15%, and thus the former was consistent with the latter. The factors of the variation of natural frequency are the deformation caused by thermal expansion and the temperature dependence of shear modulus. The results of theoretical calculations indicated that the principal factor in the change of natural frequency was the shear modulus on the temperature.

Original languageEnglish
Article number035002
JournalJournal of Micromechanics and Microengineering
Volume26
Issue number3
DOIs
Publication statusPublished - Jan 20 2016

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Electrostatics
Natural frequencies
Scanning
Temperature
Elastic moduli
MOEMS
Lasers
Medical imaging
Silicon
Laser beams
Thermal expansion
Mirrors
Display devices
Single crystals

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Temperature dependence of the scanning performance of an electrostatic microscanner. / Ishikawa, Noriaki; Ikeda, Kentaro; Sawada, Renshi.

In: Journal of Micromechanics and Microengineering, Vol. 26, No. 3, 035002, 20.01.2016.

Research output: Contribution to journalArticle

@article{95445d6357e54840abdb2024802cbd7e,
title = "Temperature dependence of the scanning performance of an electrostatic microscanner",
abstract = "An optical microscanner is one examples of an optical-MEMS device, which scans a laser beam across one or two dimensions by reflecting it. The microscanner has a range of applications, such as laser printers, laser displays and bio-medical imaging. For each application, the mirror is required to oscillated at a certain frequency and optical scan angle. However, its scanning performance varies with temperature. To address this issue, the temperature dependence of the natural frequency of a 1D electrostatic microscanner formed of single-crystal silicon is investigated both theorectically and experimentally in this paper. As the temperature rises from 30°C to 80°C, the calculated value of the natural frequency decreased from 1910.81 Hz to 1908.68 Hz, and the experimental value decreased from 2123.85 Hz to 2120.56 Hz. The percentage changes in calculated and experimental results were -0.11{\%} and -0.15{\%}, and thus the former was consistent with the latter. The factors of the variation of natural frequency are the deformation caused by thermal expansion and the temperature dependence of shear modulus. The results of theoretical calculations indicated that the principal factor in the change of natural frequency was the shear modulus on the temperature.",
author = "Noriaki Ishikawa and Kentaro Ikeda and Renshi Sawada",
year = "2016",
month = "1",
day = "20",
doi = "10.1088/0960-1317/26/3/035002",
language = "English",
volume = "26",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "3",

}

TY - JOUR

T1 - Temperature dependence of the scanning performance of an electrostatic microscanner

AU - Ishikawa, Noriaki

AU - Ikeda, Kentaro

AU - Sawada, Renshi

PY - 2016/1/20

Y1 - 2016/1/20

N2 - An optical microscanner is one examples of an optical-MEMS device, which scans a laser beam across one or two dimensions by reflecting it. The microscanner has a range of applications, such as laser printers, laser displays and bio-medical imaging. For each application, the mirror is required to oscillated at a certain frequency and optical scan angle. However, its scanning performance varies with temperature. To address this issue, the temperature dependence of the natural frequency of a 1D electrostatic microscanner formed of single-crystal silicon is investigated both theorectically and experimentally in this paper. As the temperature rises from 30°C to 80°C, the calculated value of the natural frequency decreased from 1910.81 Hz to 1908.68 Hz, and the experimental value decreased from 2123.85 Hz to 2120.56 Hz. The percentage changes in calculated and experimental results were -0.11% and -0.15%, and thus the former was consistent with the latter. The factors of the variation of natural frequency are the deformation caused by thermal expansion and the temperature dependence of shear modulus. The results of theoretical calculations indicated that the principal factor in the change of natural frequency was the shear modulus on the temperature.

AB - An optical microscanner is one examples of an optical-MEMS device, which scans a laser beam across one or two dimensions by reflecting it. The microscanner has a range of applications, such as laser printers, laser displays and bio-medical imaging. For each application, the mirror is required to oscillated at a certain frequency and optical scan angle. However, its scanning performance varies with temperature. To address this issue, the temperature dependence of the natural frequency of a 1D electrostatic microscanner formed of single-crystal silicon is investigated both theorectically and experimentally in this paper. As the temperature rises from 30°C to 80°C, the calculated value of the natural frequency decreased from 1910.81 Hz to 1908.68 Hz, and the experimental value decreased from 2123.85 Hz to 2120.56 Hz. The percentage changes in calculated and experimental results were -0.11% and -0.15%, and thus the former was consistent with the latter. The factors of the variation of natural frequency are the deformation caused by thermal expansion and the temperature dependence of shear modulus. The results of theoretical calculations indicated that the principal factor in the change of natural frequency was the shear modulus on the temperature.

UR - http://www.scopus.com/inward/record.url?scp=84959420327&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84959420327&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/26/3/035002

DO - 10.1088/0960-1317/26/3/035002

M3 - Article

AN - SCOPUS:84959420327

VL - 26

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 3

M1 - 035002

ER -